JPS5954807U - 組立精度測定装置 - Google Patents

組立精度測定装置

Info

Publication number
JPS5954807U
JPS5954807U JP15047582U JP15047582U JPS5954807U JP S5954807 U JPS5954807 U JP S5954807U JP 15047582 U JP15047582 U JP 15047582U JP 15047582 U JP15047582 U JP 15047582U JP S5954807 U JPS5954807 U JP S5954807U
Authority
JP
Japan
Prior art keywords
gap
detection
optical system
diffracted light
measuring device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15047582U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0128403Y2 (enExample
Inventor
明 小野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP15047582U priority Critical patent/JPS5954807U/ja
Publication of JPS5954807U publication Critical patent/JPS5954807U/ja
Application granted granted Critical
Publication of JPH0128403Y2 publication Critical patent/JPH0128403Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP15047582U 1982-10-05 1982-10-05 組立精度測定装置 Granted JPS5954807U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15047582U JPS5954807U (ja) 1982-10-05 1982-10-05 組立精度測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15047582U JPS5954807U (ja) 1982-10-05 1982-10-05 組立精度測定装置

Publications (2)

Publication Number Publication Date
JPS5954807U true JPS5954807U (ja) 1984-04-10
JPH0128403Y2 JPH0128403Y2 (enExample) 1989-08-30

Family

ID=30333738

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15047582U Granted JPS5954807U (ja) 1982-10-05 1982-10-05 組立精度測定装置

Country Status (1)

Country Link
JP (1) JPS5954807U (enExample)

Also Published As

Publication number Publication date
JPH0128403Y2 (enExample) 1989-08-30

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