JPS5951543A - 集積回路用基板の製造方法 - Google Patents

集積回路用基板の製造方法

Info

Publication number
JPS5951543A
JPS5951543A JP57162729A JP16272982A JPS5951543A JP S5951543 A JPS5951543 A JP S5951543A JP 57162729 A JP57162729 A JP 57162729A JP 16272982 A JP16272982 A JP 16272982A JP S5951543 A JPS5951543 A JP S5951543A
Authority
JP
Japan
Prior art keywords
silicon
polycrystalline silicon
substrate
polycrystalline
silicon layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57162729A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6244416B2 (cg-RX-API-DMAC10.html
Inventor
Akinobu Satou
佐藤　倬暢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JIDO KEISOKU GIJUTSU KENKIYUUKUMIAI
Original Assignee
JIDO KEISOKU GIJUTSU KENKIYUUKUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JIDO KEISOKU GIJUTSU KENKIYUUKUMIAI filed Critical JIDO KEISOKU GIJUTSU KENKIYUUKUMIAI
Priority to JP57162729A priority Critical patent/JPS5951543A/ja
Publication of JPS5951543A publication Critical patent/JPS5951543A/ja
Publication of JPS6244416B2 publication Critical patent/JPS6244416B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/019—
    • H10W10/10—

Landscapes

  • Element Separation (AREA)
JP57162729A 1982-09-17 1982-09-17 集積回路用基板の製造方法 Granted JPS5951543A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57162729A JPS5951543A (ja) 1982-09-17 1982-09-17 集積回路用基板の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57162729A JPS5951543A (ja) 1982-09-17 1982-09-17 集積回路用基板の製造方法

Publications (2)

Publication Number Publication Date
JPS5951543A true JPS5951543A (ja) 1984-03-26
JPS6244416B2 JPS6244416B2 (cg-RX-API-DMAC10.html) 1987-09-21

Family

ID=15760156

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57162729A Granted JPS5951543A (ja) 1982-09-17 1982-09-17 集積回路用基板の製造方法

Country Status (1)

Country Link
JP (1) JPS5951543A (cg-RX-API-DMAC10.html)

Also Published As

Publication number Publication date
JPS6244416B2 (cg-RX-API-DMAC10.html) 1987-09-21

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