JPS5950579A - 半導体光位置検出器 - Google Patents

半導体光位置検出器

Info

Publication number
JPS5950579A
JPS5950579A JP57161470A JP16147082A JPS5950579A JP S5950579 A JPS5950579 A JP S5950579A JP 57161470 A JP57161470 A JP 57161470A JP 16147082 A JP16147082 A JP 16147082A JP S5950579 A JPS5950579 A JP S5950579A
Authority
JP
Japan
Prior art keywords
layer
conductive film
type amorphous
transparent conductive
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57161470A
Other languages
English (en)
Japanese (ja)
Other versions
JPH04395B2 (enrdf_load_stackoverflow
Inventor
Shigenori Torihata
鳥畑　成典
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Komatsu Ltd
Original Assignee
Komatsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komatsu Ltd filed Critical Komatsu Ltd
Priority to JP57161470A priority Critical patent/JPS5950579A/ja
Publication of JPS5950579A publication Critical patent/JPS5950579A/ja
Publication of JPH04395B2 publication Critical patent/JPH04395B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/95—Circuit arrangements
    • H10F77/953—Circuit arrangements for devices having potential barriers
    • H10F77/957—Circuit arrangements for devices having potential barriers for position-sensitive photodetectors, e.g. lateral-effect photodiodes or quadrant photodiodes

Landscapes

  • Light Receiving Elements (AREA)
  • Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
JP57161470A 1982-09-16 1982-09-16 半導体光位置検出器 Granted JPS5950579A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57161470A JPS5950579A (ja) 1982-09-16 1982-09-16 半導体光位置検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57161470A JPS5950579A (ja) 1982-09-16 1982-09-16 半導体光位置検出器

Publications (2)

Publication Number Publication Date
JPS5950579A true JPS5950579A (ja) 1984-03-23
JPH04395B2 JPH04395B2 (enrdf_load_stackoverflow) 1992-01-07

Family

ID=15735702

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57161470A Granted JPS5950579A (ja) 1982-09-16 1982-09-16 半導体光位置検出器

Country Status (1)

Country Link
JP (1) JPS5950579A (enrdf_load_stackoverflow)

Cited By (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5956778A (ja) * 1982-09-27 1984-04-02 Toshiba Corp 半導体位置検出器
JPS5984587A (ja) * 1982-11-08 1984-05-16 Anritsu Corp 位置センサ
JPS61201482A (ja) * 1985-03-04 1986-09-06 Komatsu Ltd 半導体光位置検出器における抵抗層の形成方法
JPS61216490A (ja) * 1985-03-22 1986-09-26 Komatsu Ltd 半導体光位置検出器における集電電極の形成方法
JPS61229372A (ja) * 1985-04-03 1986-10-13 Komatsu Ltd 半導体位置検出器
JPS61204243U (enrdf_load_stackoverflow) * 1985-06-08 1986-12-23
JPS62203346A (ja) * 1986-03-04 1987-09-08 Hamamatsu Photonics Kk 半導体位置検出装置
US4761547A (en) * 1985-03-18 1988-08-02 Kabushiki Kaisha Komatsu Seisakusho Semiconductor photoelectric conversion device for light incident position detection
JPH0274838A (ja) * 1988-09-09 1990-03-14 Komatsu Ltd ３軸力センサ
JPH0294863U (enrdf_load_stackoverflow) * 1989-01-11 1990-07-27
US5025297A (en) * 1988-03-07 1991-06-18 Kanegafuchi Chemical Industry Co., Ltd. Semiconductor light beam position sensor element and a position sensor and a picture image input device each using the same
EP0877231A1 (fr) * 1997-05-09 1998-11-11 Vishay S.A. Dispositif de mesure de position et de déplacement sans contact
JP2016510397A (ja) * 2012-12-19 2016-04-07 ビーエーエスエフ ソシエタス・ヨーロピアＢａｓｆ Ｓｅ １つ以上の物体を光学的に検出するための検出器
US9989623B2 (en) 2013-06-13 2018-06-05 Basf Se Detector for determining a longitudinal coordinate of an object via an intensity distribution of illuminated pixels
US10012532B2 (en) 2013-08-19 2018-07-03 Basf Se Optical detector
US10094927B2 (en) 2014-09-29 2018-10-09 Basf Se Detector for optically determining a position of at least one object
US10353049B2 (en) 2013-06-13 2019-07-16 Basf Se Detector for optically detecting an orientation of at least one object
US10412283B2 (en) 2015-09-14 2019-09-10 Trinamix Gmbh Dual aperture 3D camera and method using differing aperture areas
JP2020523784A (ja) * 2017-06-06 2020-08-06 フラウンホーファー−ゲゼルシャフト・ツール・フェルデルング・デル・アンゲヴァンテン・フォルシュング・アインゲトラーゲネル・フェライン センサデバイス及びその製造方法
US10775505B2 (en) 2015-01-30 2020-09-15 Trinamix Gmbh Detector for an optical detection of at least one object
US10890491B2 (en) 2016-10-25 2021-01-12 Trinamix Gmbh Optical detector for an optical detection
US10948567B2 (en) 2016-11-17 2021-03-16 Trinamix Gmbh Detector for optically detecting at least one object
US10955936B2 (en) 2015-07-17 2021-03-23 Trinamix Gmbh Detector for optically detecting at least one object
US11041718B2 (en) 2014-07-08 2021-06-22 Basf Se Detector for determining a position of at least one object
US11060922B2 (en) 2017-04-20 2021-07-13 Trinamix Gmbh Optical detector
US11067692B2 (en) 2017-06-26 2021-07-20 Trinamix Gmbh Detector for determining a position of at least one object
US11125880B2 (en) 2014-12-09 2021-09-21 Basf Se Optical detector
US11211513B2 (en) 2016-07-29 2021-12-28 Trinamix Gmbh Optical sensor and detector for an optical detection
US11428787B2 (en) 2016-10-25 2022-08-30 Trinamix Gmbh Detector for an optical detection of at least one object
US11860292B2 (en) 2016-11-17 2024-01-02 Trinamix Gmbh Detector and methods for authenticating at least one object

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4997583A (enrdf_load_stackoverflow) * 1972-12-01 1974-09-14
JPS5587007U (enrdf_load_stackoverflow) * 1978-12-12 1980-06-16
JPS6057716A (ja) * 1983-07-27 1985-04-03 アメリカン　テレフオン　アンド　テレグラフ　カムパニ− 波形合成装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4997583A (enrdf_load_stackoverflow) * 1972-12-01 1974-09-14
JPS5587007U (enrdf_load_stackoverflow) * 1978-12-12 1980-06-16
JPS6057716A (ja) * 1983-07-27 1985-04-03 アメリカン　テレフオン　アンド　テレグラフ　カムパニ− 波形合成装置

Cited By (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5956778A (ja) * 1982-09-27 1984-04-02 Toshiba Corp 半導体位置検出器
JPS5984587A (ja) * 1982-11-08 1984-05-16 Anritsu Corp 位置センサ
JPS61201482A (ja) * 1985-03-04 1986-09-06 Komatsu Ltd 半導体光位置検出器における抵抗層の形成方法
US4761547A (en) * 1985-03-18 1988-08-02 Kabushiki Kaisha Komatsu Seisakusho Semiconductor photoelectric conversion device for light incident position detection
JPS61216490A (ja) * 1985-03-22 1986-09-26 Komatsu Ltd 半導体光位置検出器における集電電極の形成方法
JPS61229372A (ja) * 1985-04-03 1986-10-13 Komatsu Ltd 半導体位置検出器
JPS61204243U (enrdf_load_stackoverflow) * 1985-06-08 1986-12-23
JPS62203346A (ja) * 1986-03-04 1987-09-08 Hamamatsu Photonics Kk 半導体位置検出装置
US5025297A (en) * 1988-03-07 1991-06-18 Kanegafuchi Chemical Industry Co., Ltd. Semiconductor light beam position sensor element and a position sensor and a picture image input device each using the same
US5126815A (en) * 1988-03-07 1992-06-30 Kanegafuchi Chemical Industry Co., Ltd. Position sensor and picture image input device
JPH0274838A (ja) * 1988-09-09 1990-03-14 Komatsu Ltd ３軸力センサ
JPH0294863U (enrdf_load_stackoverflow) * 1989-01-11 1990-07-27
EP0877231A1 (fr) * 1997-05-09 1998-11-11 Vishay S.A. Dispositif de mesure de position et de déplacement sans contact
FR2763122A1 (fr) * 1997-05-09 1998-11-13 Vishay Sa Dispositif de mesure de position et de deplacement sans contact
US6034765A (en) * 1997-05-09 2000-03-07 Vishay Sa Contactless position and displacement measuring device
JP2016510397A (ja) * 2012-12-19 2016-04-07 ビーエーエスエフ ソシエタス・ヨーロピアＢａｓｆ Ｓｅ １つ以上の物体を光学的に検出するための検出器
US10120078B2 (en) 2012-12-19 2018-11-06 Basf Se Detector having a transversal optical sensor and a longitudinal optical sensor
US10353049B2 (en) 2013-06-13 2019-07-16 Basf Se Detector for optically detecting an orientation of at least one object
US9989623B2 (en) 2013-06-13 2018-06-05 Basf Se Detector for determining a longitudinal coordinate of an object via an intensity distribution of illuminated pixels
US10823818B2 (en) 2013-06-13 2020-11-03 Basf Se Detector for optically detecting at least one object
US10845459B2 (en) 2013-06-13 2020-11-24 Basf Se Detector for optically detecting at least one object
US10012532B2 (en) 2013-08-19 2018-07-03 Basf Se Optical detector
US11041718B2 (en) 2014-07-08 2021-06-22 Basf Se Detector for determining a position of at least one object
US10094927B2 (en) 2014-09-29 2018-10-09 Basf Se Detector for optically determining a position of at least one object
US11125880B2 (en) 2014-12-09 2021-09-21 Basf Se Optical detector
US10775505B2 (en) 2015-01-30 2020-09-15 Trinamix Gmbh Detector for an optical detection of at least one object
US10955936B2 (en) 2015-07-17 2021-03-23 Trinamix Gmbh Detector for optically detecting at least one object
US10412283B2 (en) 2015-09-14 2019-09-10 Trinamix Gmbh Dual aperture 3D camera and method using differing aperture areas
US11211513B2 (en) 2016-07-29 2021-12-28 Trinamix Gmbh Optical sensor and detector for an optical detection
US11428787B2 (en) 2016-10-25 2022-08-30 Trinamix Gmbh Detector for an optical detection of at least one object
US10890491B2 (en) 2016-10-25 2021-01-12 Trinamix Gmbh Optical detector for an optical detection
US11415661B2 (en) 2016-11-17 2022-08-16 Trinamix Gmbh Detector for optically detecting at least one object
US10948567B2 (en) 2016-11-17 2021-03-16 Trinamix Gmbh Detector for optically detecting at least one object
US11635486B2 (en) 2016-11-17 2023-04-25 Trinamix Gmbh Detector for optically detecting at least one object
US11698435B2 (en) 2016-11-17 2023-07-11 Trinamix Gmbh Detector for optically detecting at least one object
US11860292B2 (en) 2016-11-17 2024-01-02 Trinamix Gmbh Detector and methods for authenticating at least one object
US11060922B2 (en) 2017-04-20 2021-07-13 Trinamix Gmbh Optical detector
JP2020523784A (ja) * 2017-06-06 2020-08-06 フラウンホーファー−ゲゼルシャフト・ツール・フェルデルング・デル・アンゲヴァンテン・フォルシュング・アインゲトラーゲネル・フェライン センサデバイス及びその製造方法
US11217619B2 (en) 2017-06-06 2022-01-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Sensor device and method of manufacturing the same
US11067692B2 (en) 2017-06-26 2021-07-20 Trinamix Gmbh Detector for determining a position of at least one object

Also Published As

Publication number Publication date
JPH04395B2 (enrdf_load_stackoverflow) 1992-01-07

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