JPS5950015A - アモルフアスシリコン感光体の形成方法 - Google Patents
アモルフアスシリコン感光体の形成方法Info
- Publication number
- JPS5950015A JPS5950015A JP16189282A JP16189282A JPS5950015A JP S5950015 A JPS5950015 A JP S5950015A JP 16189282 A JP16189282 A JP 16189282A JP 16189282 A JP16189282 A JP 16189282A JP S5950015 A JPS5950015 A JP S5950015A
- Authority
- JP
- Japan
- Prior art keywords
- amorphous silicon
- layer
- container
- amorphous
- gasified
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910021417 amorphous silicon Inorganic materials 0.000 title claims abstract description 52
- 108091008695 photoreceptors Proteins 0.000 title claims abstract description 20
- 230000015572 biosynthetic process Effects 0.000 title claims abstract description 11
- 239000007789 gas Substances 0.000 claims abstract description 43
- 239000000758 substrate Substances 0.000 claims abstract description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 4
- 239000010703 silicon Substances 0.000 claims abstract description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 44
- 229910052786 argon Inorganic materials 0.000 claims description 22
- 150000003377 silicon compounds Chemical class 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 11
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 5
- 229910001882 dioxygen Inorganic materials 0.000 claims description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 2
- 238000005234 chemical deposition Methods 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims description 2
- 239000001301 oxygen Substances 0.000 claims description 2
- 229910052760 oxygen Inorganic materials 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 abstract description 14
- 150000001875 compounds Chemical class 0.000 abstract 2
- 229910000077 silane Inorganic materials 0.000 description 12
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 7
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052711 selenium Inorganic materials 0.000 description 2
- 239000011669 selenium Substances 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052980 cadmium sulfide Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 229960005265 selenium sulfide Drugs 0.000 description 1
Landscapes
- Photoreceptors In Electrophotography (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16189282A JPS5950015A (ja) | 1982-09-16 | 1982-09-16 | アモルフアスシリコン感光体の形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16189282A JPS5950015A (ja) | 1982-09-16 | 1982-09-16 | アモルフアスシリコン感光体の形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5950015A true JPS5950015A (ja) | 1984-03-22 |
| JPH0461073B2 JPH0461073B2 (enrdf_load_stackoverflow) | 1992-09-29 |
Family
ID=15743982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16189282A Granted JPS5950015A (ja) | 1982-09-16 | 1982-09-16 | アモルフアスシリコン感光体の形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5950015A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03117813A (ja) * | 1990-08-13 | 1991-05-20 | Dainichi Kogyo Kk | 液体燃料燃焼装置 |
-
1982
- 1982-09-16 JP JP16189282A patent/JPS5950015A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03117813A (ja) * | 1990-08-13 | 1991-05-20 | Dainichi Kogyo Kk | 液体燃料燃焼装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0461073B2 (enrdf_load_stackoverflow) | 1992-09-29 |
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