JPS5948040U - 熱処理装置 - Google Patents

熱処理装置

Info

Publication number
JPS5948040U
JPS5948040U JP14461382U JP14461382U JPS5948040U JP S5948040 U JPS5948040 U JP S5948040U JP 14461382 U JP14461382 U JP 14461382U JP 14461382 U JP14461382 U JP 14461382U JP S5948040 U JPS5948040 U JP S5948040U
Authority
JP
Japan
Prior art keywords
heat treatment
treatment equipment
heating
sample
heating means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14461382U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0234824Y2 (enrdf_load_stackoverflow
Inventor
魚落 泰雄
下田 春夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14461382U priority Critical patent/JPS5948040U/ja
Publication of JPS5948040U publication Critical patent/JPS5948040U/ja
Application granted granted Critical
Publication of JPH0234824Y2 publication Critical patent/JPH0234824Y2/ja
Granted legal-status Critical Current

Links

JP14461382U 1982-09-24 1982-09-24 熱処理装置 Granted JPS5948040U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14461382U JPS5948040U (ja) 1982-09-24 1982-09-24 熱処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14461382U JPS5948040U (ja) 1982-09-24 1982-09-24 熱処理装置

Publications (2)

Publication Number Publication Date
JPS5948040U true JPS5948040U (ja) 1984-03-30
JPH0234824Y2 JPH0234824Y2 (enrdf_load_stackoverflow) 1990-09-19

Family

ID=30322437

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14461382U Granted JPS5948040U (ja) 1982-09-24 1982-09-24 熱処理装置

Country Status (1)

Country Link
JP (1) JPS5948040U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5565851U (enrdf_load_stackoverflow) * 1978-10-26 1980-05-07

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5565851U (enrdf_load_stackoverflow) * 1978-10-26 1980-05-07

Also Published As

Publication number Publication date
JPH0234824Y2 (enrdf_load_stackoverflow) 1990-09-19

Similar Documents

Publication Publication Date Title
JPS5948040U (ja) 熱処理装置
JPS5958937U (ja) 熱処理装置
JPS59177937U (ja) 赤外線熱処理装置
JPS5954924U (ja) 乾燥装置
JPS6049624U (ja) 熱処理装置
JPS60129128U (ja) 熱処理用石英部品
JPS59171339U (ja) 赤外線熱処理装置
JPH0162359U (enrdf_load_stackoverflow)
JPS6344437U (enrdf_load_stackoverflow)
JPS6067349U (ja) 雰囲気型熱処理炉
JPH0195727U (enrdf_load_stackoverflow)
JPH0226228U (enrdf_load_stackoverflow)
JPS5951072U (ja) 赤外線ランプ炉
JPS6111773U (ja) 拡散炉
JPS59132634U (ja) 半導体製造装置
JPS5987657U (ja) 試料高温装置
JPH0171436U (enrdf_load_stackoverflow)
JPS5965734U (ja) 化学気相成長装置
JPS58180458U (ja) 試料高温装置
JPS6212944U (enrdf_load_stackoverflow)
JPS59151146U (ja) 試料容器清浄装置
JPS6025143U (ja) 半導体熱処理炉
JPH028133U (enrdf_load_stackoverflow)
JPS6088539U (ja) 反応性スパツタエツチング装置
JPS6439630U (enrdf_load_stackoverflow)