JPH0162359U - - Google Patents

Info

Publication number
JPH0162359U
JPH0162359U JP15635087U JP15635087U JPH0162359U JP H0162359 U JPH0162359 U JP H0162359U JP 15635087 U JP15635087 U JP 15635087U JP 15635087 U JP15635087 U JP 15635087U JP H0162359 U JPH0162359 U JP H0162359U
Authority
JP
Japan
Prior art keywords
reaction chamber
electrode
wafer
heating
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15635087U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15635087U priority Critical patent/JPH0162359U/ja
Publication of JPH0162359U publication Critical patent/JPH0162359U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP15635087U 1987-10-13 1987-10-13 Pending JPH0162359U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15635087U JPH0162359U (enrdf_load_stackoverflow) 1987-10-13 1987-10-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15635087U JPH0162359U (enrdf_load_stackoverflow) 1987-10-13 1987-10-13

Publications (1)

Publication Number Publication Date
JPH0162359U true JPH0162359U (enrdf_load_stackoverflow) 1989-04-20

Family

ID=31434814

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15635087U Pending JPH0162359U (enrdf_load_stackoverflow) 1987-10-13 1987-10-13

Country Status (1)

Country Link
JP (1) JPH0162359U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS559948A (en) * 1978-07-07 1980-01-24 Fuji Sash Kogyo Kk Vertically mobile window
JPS5753939A (en) * 1980-09-17 1982-03-31 Matsushita Electric Ind Co Ltd Dry etching method for thin film

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS559948A (en) * 1978-07-07 1980-01-24 Fuji Sash Kogyo Kk Vertically mobile window
JPS5753939A (en) * 1980-09-17 1982-03-31 Matsushita Electric Ind Co Ltd Dry etching method for thin film

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