JPH028133U - - Google Patents

Info

Publication number
JPH028133U
JPH028133U JP8504288U JP8504288U JPH028133U JP H028133 U JPH028133 U JP H028133U JP 8504288 U JP8504288 U JP 8504288U JP 8504288 U JP8504288 U JP 8504288U JP H028133 U JPH028133 U JP H028133U
Authority
JP
Japan
Prior art keywords
chamber
loading
outer periphery
utility
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8504288U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8504288U priority Critical patent/JPH028133U/ja
Publication of JPH028133U publication Critical patent/JPH028133U/ja
Pending legal-status Critical Current

Links

JP8504288U 1988-06-29 1988-06-29 Pending JPH028133U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8504288U JPH028133U (enrdf_load_stackoverflow) 1988-06-29 1988-06-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8504288U JPH028133U (enrdf_load_stackoverflow) 1988-06-29 1988-06-29

Publications (1)

Publication Number Publication Date
JPH028133U true JPH028133U (enrdf_load_stackoverflow) 1990-01-19

Family

ID=31309715

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8504288U Pending JPH028133U (enrdf_load_stackoverflow) 1988-06-29 1988-06-29

Country Status (1)

Country Link
JP (1) JPH028133U (enrdf_load_stackoverflow)

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