JPS6212944U - - Google Patents

Info

Publication number
JPS6212944U
JPS6212944U JP10435085U JP10435085U JPS6212944U JP S6212944 U JPS6212944 U JP S6212944U JP 10435085 U JP10435085 U JP 10435085U JP 10435085 U JP10435085 U JP 10435085U JP S6212944 U JPS6212944 U JP S6212944U
Authority
JP
Japan
Prior art keywords
substrate
reactor
processed
heat treatment
ultraviolet lamp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10435085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10435085U priority Critical patent/JPS6212944U/ja
Publication of JPS6212944U publication Critical patent/JPS6212944U/ja
Pending legal-status Critical Current

Links

JP10435085U 1985-07-09 1985-07-09 Pending JPS6212944U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10435085U JPS6212944U (enrdf_load_stackoverflow) 1985-07-09 1985-07-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10435085U JPS6212944U (enrdf_load_stackoverflow) 1985-07-09 1985-07-09

Publications (1)

Publication Number Publication Date
JPS6212944U true JPS6212944U (enrdf_load_stackoverflow) 1987-01-26

Family

ID=30977765

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10435085U Pending JPS6212944U (enrdf_load_stackoverflow) 1985-07-09 1985-07-09

Country Status (1)

Country Link
JP (1) JPS6212944U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5753942A (en) * 1980-09-17 1982-03-31 Semiconductor Res Found Method of oxidation and diffusion
JPS6053032A (ja) * 1983-09-02 1985-03-26 Hitachi Ltd 処理装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5753942A (en) * 1980-09-17 1982-03-31 Semiconductor Res Found Method of oxidation and diffusion
JPS6053032A (ja) * 1983-09-02 1985-03-26 Hitachi Ltd 処理装置

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