JPS5947463B2 - 半導体集積回路装置 - Google Patents

半導体集積回路装置

Info

Publication number
JPS5947463B2
JPS5947463B2 JP48097567A JP9756773A JPS5947463B2 JP S5947463 B2 JPS5947463 B2 JP S5947463B2 JP 48097567 A JP48097567 A JP 48097567A JP 9756773 A JP9756773 A JP 9756773A JP S5947463 B2 JPS5947463 B2 JP S5947463B2
Authority
JP
Japan
Prior art keywords
pattern
semiconductor
elements
same
resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP48097567A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5046272A (enExample
Inventor
市右衛門 佐々木
勇 高島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP48097567A priority Critical patent/JPS5947463B2/ja
Publication of JPS5046272A publication Critical patent/JPS5046272A/ja
Publication of JPS5947463B2 publication Critical patent/JPS5947463B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP48097567A 1973-08-29 1973-08-29 半導体集積回路装置 Expired JPS5947463B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48097567A JPS5947463B2 (ja) 1973-08-29 1973-08-29 半導体集積回路装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48097567A JPS5947463B2 (ja) 1973-08-29 1973-08-29 半導体集積回路装置

Related Child Applications (3)

Application Number Title Priority Date Filing Date
JP57050403A Division JPS5821433B2 (ja) 1982-03-29 1982-03-29 半導体集積回路装置の製造方法
JP57050404A Division JPS57202774A (en) 1982-03-29 1982-03-29 Semiconductor device
JP57050405A Division JPS5821365A (ja) 1982-03-29 1982-03-29 半導体集積回路装置

Publications (2)

Publication Number Publication Date
JPS5046272A JPS5046272A (enExample) 1975-04-24
JPS5947463B2 true JPS5947463B2 (ja) 1984-11-19

Family

ID=14195796

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48097567A Expired JPS5947463B2 (ja) 1973-08-29 1973-08-29 半導体集積回路装置

Country Status (1)

Country Link
JP (1) JPS5947463B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62139256U (enExample) * 1986-02-24 1987-09-02

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56116658A (en) * 1980-02-20 1981-09-12 Hitachi Ltd Semiconductor resistance element and manufacture thereof
JPS5735378A (en) * 1980-08-11 1982-02-25 Matsushita Electric Ind Co Ltd Semiconductor device
JPS6097660A (ja) * 1983-11-01 1985-05-31 Toshiba Corp 半導体装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62139256U (enExample) * 1986-02-24 1987-09-02

Also Published As

Publication number Publication date
JPS5046272A (enExample) 1975-04-24

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