JPS5046272A - - Google Patents
Info
- Publication number
- JPS5046272A JPS5046272A JP48097567A JP9756773A JPS5046272A JP S5046272 A JPS5046272 A JP S5046272A JP 48097567 A JP48097567 A JP 48097567A JP 9756773 A JP9756773 A JP 9756773A JP S5046272 A JPS5046272 A JP S5046272A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Semiconductor Integrated Circuits (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48097567A JPS5947463B2 (ja) | 1973-08-29 | 1973-08-29 | 半導体集積回路装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48097567A JPS5947463B2 (ja) | 1973-08-29 | 1973-08-29 | 半導体集積回路装置 |
Related Child Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57050403A Division JPS5821433B2 (ja) | 1982-03-29 | 1982-03-29 | 半導体集積回路装置の製造方法 |
| JP57050404A Division JPS57202774A (en) | 1982-03-29 | 1982-03-29 | Semiconductor device |
| JP57050405A Division JPS5821365A (ja) | 1982-03-29 | 1982-03-29 | 半導体集積回路装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5046272A true JPS5046272A (enExample) | 1975-04-24 |
| JPS5947463B2 JPS5947463B2 (ja) | 1984-11-19 |
Family
ID=14195796
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48097567A Expired JPS5947463B2 (ja) | 1973-08-29 | 1973-08-29 | 半導体集積回路装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5947463B2 (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56116658A (en) * | 1980-02-20 | 1981-09-12 | Hitachi Ltd | Semiconductor resistance element and manufacture thereof |
| JPS5735378A (en) * | 1980-08-11 | 1982-02-25 | Matsushita Electric Ind Co Ltd | Semiconductor device |
| JPS6097660A (ja) * | 1983-11-01 | 1985-05-31 | Toshiba Corp | 半導体装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62139256U (enExample) * | 1986-02-24 | 1987-09-02 |
-
1973
- 1973-08-29 JP JP48097567A patent/JPS5947463B2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56116658A (en) * | 1980-02-20 | 1981-09-12 | Hitachi Ltd | Semiconductor resistance element and manufacture thereof |
| JPS5735378A (en) * | 1980-08-11 | 1982-02-25 | Matsushita Electric Ind Co Ltd | Semiconductor device |
| JPS6097660A (ja) * | 1983-11-01 | 1985-05-31 | Toshiba Corp | 半導体装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5947463B2 (ja) | 1984-11-19 |