JPS5944875A - 梁構造体を有する半導体装置 - Google Patents

梁構造体を有する半導体装置

Info

Publication number
JPS5944875A
JPS5944875A JP57154826A JP15482682A JPS5944875A JP S5944875 A JPS5944875 A JP S5944875A JP 57154826 A JP57154826 A JP 57154826A JP 15482682 A JP15482682 A JP 15482682A JP S5944875 A JPS5944875 A JP S5944875A
Authority
JP
Japan
Prior art keywords
layer
movable beam
film
semiconductor device
polysilicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57154826A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0472190B2 (cs
Inventor
Shigeo Hoshino
重夫 星野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissan Motor Co Ltd
Original Assignee
Nissan Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Motor Co Ltd filed Critical Nissan Motor Co Ltd
Priority to JP57154826A priority Critical patent/JPS5944875A/ja
Publication of JPS5944875A publication Critical patent/JPS5944875A/ja
Publication of JPH0472190B2 publication Critical patent/JPH0472190B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/60—Capacitors
    • H10D1/62—Capacitors having potential barriers
    • H10D1/66—Conductor-insulator-semiconductor capacitors, e.g. MOS capacitors

Landscapes

  • Pressure Sensors (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Weting (AREA)
JP57154826A 1982-09-06 1982-09-06 梁構造体を有する半導体装置 Granted JPS5944875A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57154826A JPS5944875A (ja) 1982-09-06 1982-09-06 梁構造体を有する半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57154826A JPS5944875A (ja) 1982-09-06 1982-09-06 梁構造体を有する半導体装置

Publications (2)

Publication Number Publication Date
JPS5944875A true JPS5944875A (ja) 1984-03-13
JPH0472190B2 JPH0472190B2 (cs) 1992-11-17

Family

ID=15592720

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57154826A Granted JPS5944875A (ja) 1982-09-06 1982-09-06 梁構造体を有する半導体装置

Country Status (1)

Country Link
JP (1) JPS5944875A (cs)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61100627A (ja) * 1984-10-24 1986-05-19 Yokogawa Hokushin Electric Corp 振動式歪センサ
JPH01320470A (ja) * 1988-06-21 1989-12-26 Fujikura Ltd 半導体加速度センサ
JPH04192370A (ja) * 1990-11-26 1992-07-10 Nissan Motor Co Ltd 半導体加速度センサ
WO1994006024A1 (fr) * 1992-09-04 1994-03-17 Murata Manufacturing Co., Ltd. Capteur d'acceleration
JP2007121107A (ja) * 2005-10-27 2007-05-17 Nec Lcd Technologies Ltd 圧力センサー
USRE40347E1 (en) 1992-04-27 2008-06-03 Denso Corporation Acceleration sensor and process for the production thereof
US7578162B2 (en) 1989-12-28 2009-08-25 Kazuhiro Okada Apparatus for detecting a physical quantity acting as an external force and method for testing and manufacturing this apparatus
JP2009294225A (ja) * 2009-09-17 2009-12-17 Denso Corp 半導体力学量センサ
US7866210B2 (en) 1992-08-21 2011-01-11 Denso Corporation Semiconductor mechanical sensor

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61100627A (ja) * 1984-10-24 1986-05-19 Yokogawa Hokushin Electric Corp 振動式歪センサ
JPH01320470A (ja) * 1988-06-21 1989-12-26 Fujikura Ltd 半導体加速度センサ
US7578162B2 (en) 1989-12-28 2009-08-25 Kazuhiro Okada Apparatus for detecting a physical quantity acting as an external force and method for testing and manufacturing this apparatus
JPH04192370A (ja) * 1990-11-26 1992-07-10 Nissan Motor Co Ltd 半導体加速度センサ
USRE41047E1 (en) 1992-04-27 2009-12-22 Denso Corporation Acceleration sensor and process for the production thereof
USRE40347E1 (en) 1992-04-27 2008-06-03 Denso Corporation Acceleration sensor and process for the production thereof
USRE40561E1 (en) 1992-04-27 2008-11-04 Denso Corporation Acceleration sensor and process for the production thereof
USRE41213E1 (en) 1992-04-27 2010-04-13 Denso Corporation Dynamic amount sensor and process for the production thereof
USRE42083E1 (en) 1992-04-27 2011-02-01 Denso Corporation Acceleration sensor and process for the production thereof
US7866210B2 (en) 1992-08-21 2011-01-11 Denso Corporation Semiconductor mechanical sensor
WO1994006024A1 (fr) * 1992-09-04 1994-03-17 Murata Manufacturing Co., Ltd. Capteur d'acceleration
JP2007121107A (ja) * 2005-10-27 2007-05-17 Nec Lcd Technologies Ltd 圧力センサー
JP2009294225A (ja) * 2009-09-17 2009-12-17 Denso Corp 半導体力学量センサ

Also Published As

Publication number Publication date
JPH0472190B2 (cs) 1992-11-17

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