JPS5944004A - 薄膜光回路用基板 - Google Patents
薄膜光回路用基板Info
- Publication number
- JPS5944004A JPS5944004A JP15542882A JP15542882A JPS5944004A JP S5944004 A JPS5944004 A JP S5944004A JP 15542882 A JP15542882 A JP 15542882A JP 15542882 A JP15542882 A JP 15542882A JP S5944004 A JPS5944004 A JP S5944004A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- optical circuit
- propagation medium
- substrate
- medium layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 75
- 230000003287 optical effect Effects 0.000 title claims abstract description 71
- 239000000758 substrate Substances 0.000 title claims abstract description 57
- 239000013078 crystal Substances 0.000 claims abstract description 42
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229910052594 sapphire Inorganic materials 0.000 claims abstract description 7
- 239000010980 sapphire Substances 0.000 claims abstract description 7
- 239000011029 spinel Substances 0.000 claims abstract description 3
- 229910052596 spinel Inorganic materials 0.000 claims abstract description 3
- 239000002184 metal Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 3
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 claims description 2
- 239000005388 borosilicate glass Substances 0.000 claims description 2
- 150000001875 compounds Chemical class 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims description 2
- -1 GaP Chemical class 0.000 claims 1
- 229910003327 LiNbO3 Inorganic materials 0.000 claims 1
- 229910002113 barium titanate Inorganic materials 0.000 claims 1
- 239000010408 film Substances 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 abstract description 5
- 239000000463 material Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 239000000470 constituent Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910012463 LiTaO3 Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/131—Integrated optical circuits characterised by the manufacturing method by using epitaxial growth
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15542882A JPS5944004A (ja) | 1982-09-06 | 1982-09-06 | 薄膜光回路用基板 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15542882A JPS5944004A (ja) | 1982-09-06 | 1982-09-06 | 薄膜光回路用基板 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5944004A true JPS5944004A (ja) | 1984-03-12 |
| JPH0526166B2 JPH0526166B2 (enrdf_load_stackoverflow) | 1993-04-15 |
Family
ID=15605792
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15542882A Granted JPS5944004A (ja) | 1982-09-06 | 1982-09-06 | 薄膜光回路用基板 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5944004A (enrdf_load_stackoverflow) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61156231A (ja) * | 1984-12-28 | 1986-07-15 | Nec Corp | 光混成集積回路 |
| JPS62245205A (ja) * | 1986-04-17 | 1987-10-26 | Nec Corp | 薄膜光導波路およびその作製方法 |
| JPS6319516A (ja) * | 1986-07-14 | 1988-01-27 | Nippon Telegr & Teleph Corp <Ntt> | 光ｉｃ型回転センサ |
| JPS63149517A (ja) * | 1986-12-12 | 1988-06-22 | Nippon Telegr & Teleph Corp <Ntt> | リング共振器形ジヤイロスコ−プ |
| JPS63249804A (ja) * | 1987-04-06 | 1988-10-17 | Nippon Telegr & Teleph Corp <Ntt> | 石英系光導波膜の製造方法 |
| US4793697A (en) * | 1986-08-04 | 1988-12-27 | Motorola, Inc. | PLZT shutter with minimized space charge degradation |
| WO2003007440A3 (en) * | 2001-07-11 | 2003-12-18 | Motorola Inc | Integrated light source for frequency adjustment |
| WO2022158529A1 (ja) * | 2021-01-21 | 2022-07-28 | 大学共同利用機関法人自然科学研究機構 | 光学素子、光学装置、および、光学素子の製造方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57163206A (en) * | 1981-03-31 | 1982-10-07 | Matsushita Electric Ind Co Ltd | Substrate for optical circuit |
-
1982
- 1982-09-06 JP JP15542882A patent/JPS5944004A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57163206A (en) * | 1981-03-31 | 1982-10-07 | Matsushita Electric Ind Co Ltd | Substrate for optical circuit |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61156231A (ja) * | 1984-12-28 | 1986-07-15 | Nec Corp | 光混成集積回路 |
| JPS62245205A (ja) * | 1986-04-17 | 1987-10-26 | Nec Corp | 薄膜光導波路およびその作製方法 |
| JPS6319516A (ja) * | 1986-07-14 | 1988-01-27 | Nippon Telegr & Teleph Corp <Ntt> | 光ｉｃ型回転センサ |
| US4793697A (en) * | 1986-08-04 | 1988-12-27 | Motorola, Inc. | PLZT shutter with minimized space charge degradation |
| JPS63149517A (ja) * | 1986-12-12 | 1988-06-22 | Nippon Telegr & Teleph Corp <Ntt> | リング共振器形ジヤイロスコ−プ |
| JPS63249804A (ja) * | 1987-04-06 | 1988-10-17 | Nippon Telegr & Teleph Corp <Ntt> | 石英系光導波膜の製造方法 |
| WO2003007440A3 (en) * | 2001-07-11 | 2003-12-18 | Motorola Inc | Integrated light source for frequency adjustment |
| WO2022158529A1 (ja) * | 2021-01-21 | 2022-07-28 | 大学共同利用機関法人自然科学研究機構 | 光学素子、光学装置、および、光学素子の製造方法 |
| JP2022112261A (ja) * | 2021-01-21 | 2022-08-02 | 大学共同利用機関法人自然科学研究機構 | 光学素子、光学装置、および、光学素子の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0526166B2 (enrdf_load_stackoverflow) | 1993-04-15 |
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