JPS5941854U - 走査透過電子顕微鏡 - Google Patents

走査透過電子顕微鏡

Info

Publication number
JPS5941854U
JPS5941854U JP13292782U JP13292782U JPS5941854U JP S5941854 U JPS5941854 U JP S5941854U JP 13292782 U JP13292782 U JP 13292782U JP 13292782 U JP13292782 U JP 13292782U JP S5941854 U JPS5941854 U JP S5941854U
Authority
JP
Japan
Prior art keywords
electron beam
scanning
deflection
sample
electron microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13292782U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0431728Y2 (enrdf_load_stackoverflow
Inventor
善博 新井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP13292782U priority Critical patent/JPS5941854U/ja
Publication of JPS5941854U publication Critical patent/JPS5941854U/ja
Application granted granted Critical
Publication of JPH0431728Y2 publication Critical patent/JPH0431728Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP13292782U 1982-09-01 1982-09-01 走査透過電子顕微鏡 Granted JPS5941854U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13292782U JPS5941854U (ja) 1982-09-01 1982-09-01 走査透過電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13292782U JPS5941854U (ja) 1982-09-01 1982-09-01 走査透過電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS5941854U true JPS5941854U (ja) 1984-03-17
JPH0431728Y2 JPH0431728Y2 (enrdf_load_stackoverflow) 1992-07-30

Family

ID=30300024

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13292782U Granted JPS5941854U (ja) 1982-09-01 1982-09-01 走査透過電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS5941854U (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6318157B2 (ja) * 2013-08-30 2018-04-25 株式会社日立製作所 荷電粒子線レンズモジュール及びそれを備えた荷電粒子線装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56141357U (enrdf_load_stackoverflow) * 1980-03-26 1981-10-26

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56141357U (enrdf_load_stackoverflow) * 1980-03-26 1981-10-26

Also Published As

Publication number Publication date
JPH0431728Y2 (enrdf_load_stackoverflow) 1992-07-30

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