JPS5938382A - 真空蒸着装置 - Google Patents

真空蒸着装置

Info

Publication number
JPS5938382A
JPS5938382A JP14690982A JP14690982A JPS5938382A JP S5938382 A JPS5938382 A JP S5938382A JP 14690982 A JP14690982 A JP 14690982A JP 14690982 A JP14690982 A JP 14690982A JP S5938382 A JPS5938382 A JP S5938382A
Authority
JP
Japan
Prior art keywords
vapor
hood
vacuum
steel strip
cover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14690982A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6160912B2 (enrdf_load_stackoverflow
Inventor
Kenichi Yanagi
謙一 柳
Toshio Taguchi
田口　俊夫
Tetsuyoshi Wada
哲義 和田
Heizaburo Furukawa
古川　平三郎
Kanji Wake
和気　完治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Nippon Steel Nisshin Co Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Nisshin Steel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd, Nisshin Steel Co Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP14690982A priority Critical patent/JPS5938382A/ja
Publication of JPS5938382A publication Critical patent/JPS5938382A/ja
Publication of JPS6160912B2 publication Critical patent/JPS6160912B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP14690982A 1982-08-26 1982-08-26 真空蒸着装置 Granted JPS5938382A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14690982A JPS5938382A (ja) 1982-08-26 1982-08-26 真空蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14690982A JPS5938382A (ja) 1982-08-26 1982-08-26 真空蒸着装置

Publications (2)

Publication Number Publication Date
JPS5938382A true JPS5938382A (ja) 1984-03-02
JPS6160912B2 JPS6160912B2 (enrdf_load_stackoverflow) 1986-12-23

Family

ID=15418306

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14690982A Granted JPS5938382A (ja) 1982-08-26 1982-08-26 真空蒸着装置

Country Status (1)

Country Link
JP (1) JPS5938382A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60197876A (ja) * 1984-03-19 1985-10-07 Mitsubishi Heavy Ind Ltd 真空蒸着装置
JPS6213571A (ja) * 1985-07-11 1987-01-22 Nisshin Steel Co Ltd 片面連続真空蒸着方法
JPS62242040A (ja) * 1986-04-10 1987-10-22 元旦ビユーティ工業株式会社 横葺き屋根板および横葺き屋根構造
JPS6347453A (ja) * 1986-08-12 1988-02-29 元旦ビューティ工業株式会社 横葺き屋根
JPS6452949A (en) * 1987-08-25 1989-03-01 Funaki Shoji Kk Roof reroofing method of building
US5169451A (en) * 1990-09-28 1992-12-08 Mitsubishi Jukogyo Kabushiki Kaisha Vacuum vapor deposition apparatus

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51104445A (ja) * 1975-03-12 1976-09-16 Pioneer Electronic Corp Jochakusochi
JPS5233649U (enrdf_load_stackoverflow) * 1975-09-01 1977-03-09
JPS57131362A (en) * 1981-02-06 1982-08-14 Furukawa Electric Co Ltd:The Vacuum plating method and metal evaporating device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51104445A (ja) * 1975-03-12 1976-09-16 Pioneer Electronic Corp Jochakusochi
JPS5233649U (enrdf_load_stackoverflow) * 1975-09-01 1977-03-09
JPS57131362A (en) * 1981-02-06 1982-08-14 Furukawa Electric Co Ltd:The Vacuum plating method and metal evaporating device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60197876A (ja) * 1984-03-19 1985-10-07 Mitsubishi Heavy Ind Ltd 真空蒸着装置
JPS6213571A (ja) * 1985-07-11 1987-01-22 Nisshin Steel Co Ltd 片面連続真空蒸着方法
JPS62242040A (ja) * 1986-04-10 1987-10-22 元旦ビユーティ工業株式会社 横葺き屋根板および横葺き屋根構造
JPS6347453A (ja) * 1986-08-12 1988-02-29 元旦ビューティ工業株式会社 横葺き屋根
JPS6452949A (en) * 1987-08-25 1989-03-01 Funaki Shoji Kk Roof reroofing method of building
US5169451A (en) * 1990-09-28 1992-12-08 Mitsubishi Jukogyo Kabushiki Kaisha Vacuum vapor deposition apparatus

Also Published As

Publication number Publication date
JPS6160912B2 (enrdf_load_stackoverflow) 1986-12-23

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