JPS5937729U - 電子ビ−ム露光装置 - Google Patents

電子ビ−ム露光装置

Info

Publication number
JPS5937729U
JPS5937729U JP13190282U JP13190282U JPS5937729U JP S5937729 U JPS5937729 U JP S5937729U JP 13190282 U JP13190282 U JP 13190282U JP 13190282 U JP13190282 U JP 13190282U JP S5937729 U JPS5937729 U JP S5937729U
Authority
JP
Japan
Prior art keywords
electron beam
beam exposure
exposure equipment
holder
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13190282U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0412675Y2 (enrdf_load_stackoverflow
Inventor
賢次 杉島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP13190282U priority Critical patent/JPS5937729U/ja
Publication of JPS5937729U publication Critical patent/JPS5937729U/ja
Application granted granted Critical
Publication of JPH0412675Y2 publication Critical patent/JPH0412675Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
JP13190282U 1982-08-31 1982-08-31 電子ビ−ム露光装置 Granted JPS5937729U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13190282U JPS5937729U (ja) 1982-08-31 1982-08-31 電子ビ−ム露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13190282U JPS5937729U (ja) 1982-08-31 1982-08-31 電子ビ−ム露光装置

Publications (2)

Publication Number Publication Date
JPS5937729U true JPS5937729U (ja) 1984-03-09
JPH0412675Y2 JPH0412675Y2 (enrdf_load_stackoverflow) 1992-03-26

Family

ID=30298051

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13190282U Granted JPS5937729U (ja) 1982-08-31 1982-08-31 電子ビ−ム露光装置

Country Status (1)

Country Link
JP (1) JPS5937729U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5785229A (en) * 1980-11-17 1982-05-27 Toshiba Corp Casette holding device for electron beam exposure

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5785229A (en) * 1980-11-17 1982-05-27 Toshiba Corp Casette holding device for electron beam exposure

Also Published As

Publication number Publication date
JPH0412675Y2 (enrdf_load_stackoverflow) 1992-03-26

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