JPH0412675Y2 - - Google Patents

Info

Publication number
JPH0412675Y2
JPH0412675Y2 JP1982131902U JP13190282U JPH0412675Y2 JP H0412675 Y2 JPH0412675 Y2 JP H0412675Y2 JP 1982131902 U JP1982131902 U JP 1982131902U JP 13190282 U JP13190282 U JP 13190282U JP H0412675 Y2 JPH0412675 Y2 JP H0412675Y2
Authority
JP
Japan
Prior art keywords
holder
electron beam
beam exposure
guide
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982131902U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5937729U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13190282U priority Critical patent/JPS5937729U/ja
Publication of JPS5937729U publication Critical patent/JPS5937729U/ja
Application granted granted Critical
Publication of JPH0412675Y2 publication Critical patent/JPH0412675Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
JP13190282U 1982-08-31 1982-08-31 電子ビ−ム露光装置 Granted JPS5937729U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13190282U JPS5937729U (ja) 1982-08-31 1982-08-31 電子ビ−ム露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13190282U JPS5937729U (ja) 1982-08-31 1982-08-31 電子ビ−ム露光装置

Publications (2)

Publication Number Publication Date
JPS5937729U JPS5937729U (ja) 1984-03-09
JPH0412675Y2 true JPH0412675Y2 (enrdf_load_stackoverflow) 1992-03-26

Family

ID=30298051

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13190282U Granted JPS5937729U (ja) 1982-08-31 1982-08-31 電子ビ−ム露光装置

Country Status (1)

Country Link
JP (1) JPS5937729U (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5785229A (en) * 1980-11-17 1982-05-27 Toshiba Corp Casette holding device for electron beam exposure

Also Published As

Publication number Publication date
JPS5937729U (ja) 1984-03-09

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