JPS5936245U - ウエハ真空吸着装置 - Google Patents

ウエハ真空吸着装置

Info

Publication number
JPS5936245U
JPS5936245U JP12979682U JP12979682U JPS5936245U JP S5936245 U JPS5936245 U JP S5936245U JP 12979682 U JP12979682 U JP 12979682U JP 12979682 U JP12979682 U JP 12979682U JP S5936245 U JPS5936245 U JP S5936245U
Authority
JP
Japan
Prior art keywords
suction device
vacuum suction
wafer vacuum
wafer
protrusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12979682U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6228759Y2 (enrdf_load_stackoverflow
Inventor
宗統 金井
博雄 木下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP12979682U priority Critical patent/JPS5936245U/ja
Publication of JPS5936245U publication Critical patent/JPS5936245U/ja
Application granted granted Critical
Publication of JPS6228759Y2 publication Critical patent/JPS6228759Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
JP12979682U 1982-08-30 1982-08-30 ウエハ真空吸着装置 Granted JPS5936245U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12979682U JPS5936245U (ja) 1982-08-30 1982-08-30 ウエハ真空吸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12979682U JPS5936245U (ja) 1982-08-30 1982-08-30 ウエハ真空吸着装置

Publications (2)

Publication Number Publication Date
JPS5936245U true JPS5936245U (ja) 1984-03-07
JPS6228759Y2 JPS6228759Y2 (enrdf_load_stackoverflow) 1987-07-23

Family

ID=30293978

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12979682U Granted JPS5936245U (ja) 1982-08-30 1982-08-30 ウエハ真空吸着装置

Country Status (1)

Country Link
JP (1) JPS5936245U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5314073U (enrdf_load_stackoverflow) * 1976-07-19 1978-02-06

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5314073U (enrdf_load_stackoverflow) * 1976-07-19 1978-02-06

Also Published As

Publication number Publication date
JPS6228759Y2 (enrdf_load_stackoverflow) 1987-07-23

Similar Documents

Publication Publication Date Title
JPS5936245U (ja) ウエハ真空吸着装置
JPS58165838U (ja) 静電リレ−
JPS5818341U (ja) 半導体ウエハ保持具
JPS59149632U (ja) コレツト
JPS60111038U (ja) 真空チヤツク
JPS59169044U (ja) 半導体チツプ吸着用ノズル
JPS59165881U (ja) ワ−ク吸着装置
JPS5980032U (ja) 図柄を配図した畳表
JPS6052656U (ja) 回路基板
JPS60192445U (ja) ウエハ−チヤツク
JPS6042227U (ja) キ−スイッチのキ−ノイズ低減装置
JPS58155446U (ja) 緩衝台座
JPS609121U (ja) 電子スイツチ
JPS60190746U (ja) バキユ−ムカツプ
JPS6119245U (ja) フオトエツチング用露光装置
JPS5844848U (ja) 半導体ウエハ−固定用治具
JPS58171702U (ja) 手押１輪車のタイヤ
JPS58132573U (ja) 回転塗布装置
JPS59159946U (ja) 半導体装置の製造装置
JPS6067828U (ja) 加工物保持具
JPS58164274U (ja) 電子回路装置
JPS58105200U (ja) 集積回路部品
JPS59188432U (ja) 芳香剤の担体
JPS6012353U (ja) 電気掃除機用吸込具
JPS5834749U (ja) 混成集積回路