JPS5931548A - 電子線装置の結像法 - Google Patents

電子線装置の結像法

Info

Publication number
JPS5931548A
JPS5931548A JP57141615A JP14161582A JPS5931548A JP S5931548 A JPS5931548 A JP S5931548A JP 57141615 A JP57141615 A JP 57141615A JP 14161582 A JP14161582 A JP 14161582A JP S5931548 A JPS5931548 A JP S5931548A
Authority
JP
Japan
Prior art keywords
lens
objective lens
electron beam
image
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57141615A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0522331B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Akira Yonezawa
米沢　彬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INTERNATL PRECISION Inc
Original Assignee
INTERNATL PRECISION Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by INTERNATL PRECISION Inc filed Critical INTERNATL PRECISION Inc
Priority to JP57141615A priority Critical patent/JPS5931548A/ja
Publication of JPS5931548A publication Critical patent/JPS5931548A/ja
Publication of JPH0522331B2 publication Critical patent/JPH0522331B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP57141615A 1982-08-17 1982-08-17 電子線装置の結像法 Granted JPS5931548A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57141615A JPS5931548A (ja) 1982-08-17 1982-08-17 電子線装置の結像法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57141615A JPS5931548A (ja) 1982-08-17 1982-08-17 電子線装置の結像法

Publications (2)

Publication Number Publication Date
JPS5931548A true JPS5931548A (ja) 1984-02-20
JPH0522331B2 JPH0522331B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-03-29

Family

ID=15296145

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57141615A Granted JPS5931548A (ja) 1982-08-17 1982-08-17 電子線装置の結像法

Country Status (1)

Country Link
JP (1) JPS5931548A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS493293A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-04-24 1974-01-12
JPS5711464A (en) * 1980-06-25 1982-01-21 Jeol Ltd Electron microscope
JPS5760648A (en) * 1980-09-29 1982-04-12 Internatl Precision Inc Electron microscope

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS493293A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-04-24 1974-01-12
JPS5711464A (en) * 1980-06-25 1982-01-21 Jeol Ltd Electron microscope
JPS5760648A (en) * 1980-09-29 1982-04-12 Internatl Precision Inc Electron microscope

Also Published As

Publication number Publication date
JPH0522331B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-03-29

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