JPS6336108B2 - - Google Patents

Info

Publication number
JPS6336108B2
JPS6336108B2 JP55134257A JP13425780A JPS6336108B2 JP S6336108 B2 JPS6336108 B2 JP S6336108B2 JP 55134257 A JP55134257 A JP 55134257A JP 13425780 A JP13425780 A JP 13425780A JP S6336108 B2 JPS6336108 B2 JP S6336108B2
Authority
JP
Japan
Prior art keywords
lens
imaging
objective lens
image
lenses
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55134257A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5760648A (en
Inventor
Akira Yonezawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akashi Seisakusho KK
Original Assignee
Akashi Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akashi Seisakusho KK filed Critical Akashi Seisakusho KK
Priority to JP55134257A priority Critical patent/JPS5760648A/ja
Publication of JPS5760648A publication Critical patent/JPS5760648A/ja
Publication of JPS6336108B2 publication Critical patent/JPS6336108B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP55134257A 1980-09-29 1980-09-29 Electron microscope Granted JPS5760648A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55134257A JPS5760648A (en) 1980-09-29 1980-09-29 Electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55134257A JPS5760648A (en) 1980-09-29 1980-09-29 Electron microscope

Publications (2)

Publication Number Publication Date
JPS5760648A JPS5760648A (en) 1982-04-12
JPS6336108B2 true JPS6336108B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-07-19

Family

ID=15124064

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55134257A Granted JPS5760648A (en) 1980-09-29 1980-09-29 Electron microscope

Country Status (1)

Country Link
JP (1) JPS5760648A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02246708A (ja) * 1989-03-16 1990-10-02 Fuji Electric Co Ltd 配電盤の接地試験台車

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5861758A (ja) * 1981-10-09 1983-04-12 中島　昭 遠赤外線を利用する健康温熱器
JPS5927437A (ja) * 1982-08-09 1984-02-13 Internatl Precision Inc 電子顕微鏡の結像法
JPS5931548A (ja) * 1982-08-17 1984-02-20 Internatl Precision Inc 電子線装置の結像法
JP4512183B2 (ja) * 2004-03-31 2010-07-28 独立行政法人理化学研究所 電子線干渉装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4895768A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-03-17 1973-12-07
JPS526073A (en) * 1975-07-04 1977-01-18 Hitachi Ltd Magnetic field type electronic lens

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02246708A (ja) * 1989-03-16 1990-10-02 Fuji Electric Co Ltd 配電盤の接地試験台車

Also Published As

Publication number Publication date
JPS5760648A (en) 1982-04-12

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