JPS5928340A - エッチング終点検出方法 - Google Patents

エッチング終点検出方法

Info

Publication number
JPS5928340A
JPS5928340A JP57137306A JP13730682A JPS5928340A JP S5928340 A JPS5928340 A JP S5928340A JP 57137306 A JP57137306 A JP 57137306A JP 13730682 A JP13730682 A JP 13730682A JP S5928340 A JPS5928340 A JP S5928340A
Authority
JP
Japan
Prior art keywords
etching
waveform
spectral intensity
converter
gain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57137306A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0468772B2 (show.php
Inventor
Takashi Kamimura
隆 上村
Tetsuzo Tanimoto
谷本　哲三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57137306A priority Critical patent/JPS5928340A/ja
Publication of JPS5928340A publication Critical patent/JPS5928340A/ja
Publication of JPH0468772B2 publication Critical patent/JPH0468772B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/00—

Landscapes

  • Drying Of Semiconductors (AREA)
JP57137306A 1982-08-09 1982-08-09 エッチング終点検出方法 Granted JPS5928340A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57137306A JPS5928340A (ja) 1982-08-09 1982-08-09 エッチング終点検出方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57137306A JPS5928340A (ja) 1982-08-09 1982-08-09 エッチング終点検出方法

Publications (2)

Publication Number Publication Date
JPS5928340A true JPS5928340A (ja) 1984-02-15
JPH0468772B2 JPH0468772B2 (show.php) 1992-11-04

Family

ID=15195598

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57137306A Granted JPS5928340A (ja) 1982-08-09 1982-08-09 エッチング終点検出方法

Country Status (1)

Country Link
JP (1) JPS5928340A (show.php)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01226153A (ja) * 1988-03-07 1989-09-08 Hitachi Ltd エッチング終点判定装置
JPH01235336A (ja) * 1988-03-16 1989-09-20 Hitachi Ltd エッチング終点判定装置
JPH01241127A (ja) * 1988-03-23 1989-09-26 Hitachi Ltd エッチング終点判定方法
JPH01274429A (ja) * 1988-04-27 1989-11-02 Hitachi Ltd エッチング終点判定装置
JPH04240727A (ja) * 1991-01-24 1992-08-28 Mitsubishi Electric Corp プラズマ処理装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56129325A (en) * 1980-03-14 1981-10-09 Fujitsu Ltd Dry etching

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56129325A (en) * 1980-03-14 1981-10-09 Fujitsu Ltd Dry etching

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01226153A (ja) * 1988-03-07 1989-09-08 Hitachi Ltd エッチング終点判定装置
JPH01235336A (ja) * 1988-03-16 1989-09-20 Hitachi Ltd エッチング終点判定装置
JPH01241127A (ja) * 1988-03-23 1989-09-26 Hitachi Ltd エッチング終点判定方法
JPH01274429A (ja) * 1988-04-27 1989-11-02 Hitachi Ltd エッチング終点判定装置
JPH04240727A (ja) * 1991-01-24 1992-08-28 Mitsubishi Electric Corp プラズマ処理装置

Also Published As

Publication number Publication date
JPH0468772B2 (show.php) 1992-11-04

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