JPS5928033Y2 - スパツタリング装置 - Google Patents

スパツタリング装置

Info

Publication number
JPS5928033Y2
JPS5928033Y2 JP1977111447U JP11144777U JPS5928033Y2 JP S5928033 Y2 JPS5928033 Y2 JP S5928033Y2 JP 1977111447 U JP1977111447 U JP 1977111447U JP 11144777 U JP11144777 U JP 11144777U JP S5928033 Y2 JPS5928033 Y2 JP S5928033Y2
Authority
JP
Japan
Prior art keywords
adherend
target electrode
holder
particles
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1977111447U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5438156U (cg-RX-API-DMAC7.html
Inventor
隆夫 任田
清孝 和佐
茂 早川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP1977111447U priority Critical patent/JPS5928033Y2/ja
Publication of JPS5438156U publication Critical patent/JPS5438156U/ja
Application granted granted Critical
Publication of JPS5928033Y2 publication Critical patent/JPS5928033Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1977111447U 1977-08-19 1977-08-19 スパツタリング装置 Expired JPS5928033Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977111447U JPS5928033Y2 (ja) 1977-08-19 1977-08-19 スパツタリング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977111447U JPS5928033Y2 (ja) 1977-08-19 1977-08-19 スパツタリング装置

Publications (2)

Publication Number Publication Date
JPS5438156U JPS5438156U (cg-RX-API-DMAC7.html) 1979-03-13
JPS5928033Y2 true JPS5928033Y2 (ja) 1984-08-14

Family

ID=29059304

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977111447U Expired JPS5928033Y2 (ja) 1977-08-19 1977-08-19 スパツタリング装置

Country Status (1)

Country Link
JP (1) JPS5928033Y2 (cg-RX-API-DMAC7.html)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS555585B2 (cg-RX-API-DMAC7.html) * 1975-02-21 1980-02-07
JPS51142050U (cg-RX-API-DMAC7.html) * 1975-05-08 1976-11-16

Also Published As

Publication number Publication date
JPS5438156U (cg-RX-API-DMAC7.html) 1979-03-13

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