JPS5438156U - - Google Patents

Info

Publication number
JPS5438156U
JPS5438156U JP11144777U JP11144777U JPS5438156U JP S5438156 U JPS5438156 U JP S5438156U JP 11144777 U JP11144777 U JP 11144777U JP 11144777 U JP11144777 U JP 11144777U JP S5438156 U JPS5438156 U JP S5438156U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11144777U
Other languages
Japanese (ja)
Other versions
JPS5928033Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1977111447U priority Critical patent/JPS5928033Y2/ja
Publication of JPS5438156U publication Critical patent/JPS5438156U/ja
Application granted granted Critical
Publication of JPS5928033Y2 publication Critical patent/JPS5928033Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1977111447U 1977-08-19 1977-08-19 スパツタリング装置 Expired JPS5928033Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977111447U JPS5928033Y2 (ja) 1977-08-19 1977-08-19 スパツタリング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977111447U JPS5928033Y2 (ja) 1977-08-19 1977-08-19 スパツタリング装置

Publications (2)

Publication Number Publication Date
JPS5438156U true JPS5438156U (cg-RX-API-DMAC7.html) 1979-03-13
JPS5928033Y2 JPS5928033Y2 (ja) 1984-08-14

Family

ID=29059304

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977111447U Expired JPS5928033Y2 (ja) 1977-08-19 1977-08-19 スパツタリング装置

Country Status (1)

Country Link
JP (1) JPS5928033Y2 (cg-RX-API-DMAC7.html)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5196787A (cg-RX-API-DMAC7.html) * 1975-02-21 1976-08-25
JPS51142050U (cg-RX-API-DMAC7.html) * 1975-05-08 1976-11-16

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5196787A (cg-RX-API-DMAC7.html) * 1975-02-21 1976-08-25
JPS51142050U (cg-RX-API-DMAC7.html) * 1975-05-08 1976-11-16

Also Published As

Publication number Publication date
JPS5928033Y2 (ja) 1984-08-14

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