JPS59225308A - 微小間隔測定装置 - Google Patents

微小間隔測定装置

Info

Publication number
JPS59225308A
JPS59225308A JP9937083A JP9937083A JPS59225308A JP S59225308 A JPS59225308 A JP S59225308A JP 9937083 A JP9937083 A JP 9937083A JP 9937083 A JP9937083 A JP 9937083A JP S59225308 A JPS59225308 A JP S59225308A
Authority
JP
Japan
Prior art keywords
minute
wavelength
spot
interference
gap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9937083A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0452401B2 (enrdf_load_stackoverflow
Inventor
Yoshisada Oshida
良忠 押田
Toshihiko Nakada
俊彦 中田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9937083A priority Critical patent/JPS59225308A/ja
Publication of JPS59225308A publication Critical patent/JPS59225308A/ja
Publication of JPH0452401B2 publication Critical patent/JPH0452401B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B17/00—Guiding record carriers not specifically of filamentary or web form, or of supports therefor
    • G11B17/32—Maintaining desired spacing between record carrier and head, e.g. by fluid-dynamic spacing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP9937083A 1983-06-06 1983-06-06 微小間隔測定装置 Granted JPS59225308A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9937083A JPS59225308A (ja) 1983-06-06 1983-06-06 微小間隔測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9937083A JPS59225308A (ja) 1983-06-06 1983-06-06 微小間隔測定装置

Publications (2)

Publication Number Publication Date
JPS59225308A true JPS59225308A (ja) 1984-12-18
JPH0452401B2 JPH0452401B2 (enrdf_load_stackoverflow) 1992-08-21

Family

ID=14245650

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9937083A Granted JPS59225308A (ja) 1983-06-06 1983-06-06 微小間隔測定装置

Country Status (1)

Country Link
JP (1) JPS59225308A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61153505A (ja) * 1984-12-27 1986-07-12 Nippon Telegr & Teleph Corp <Ntt> 微小すきま測定装置
JPS62174212U (enrdf_load_stackoverflow) * 1986-04-25 1987-11-05
EP0689665A4 (en) * 1993-12-21 1998-05-13 Phase Metrics METHOD AND DEVICE FOR CALIBRATING INTENSITY AND DETECTING THE FRINGER FOLDER FOR THE INTERFEROMETRIC MEASUREMENT OF SMALL SPACES

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61153505A (ja) * 1984-12-27 1986-07-12 Nippon Telegr & Teleph Corp <Ntt> 微小すきま測定装置
JPS62174212U (enrdf_load_stackoverflow) * 1986-04-25 1987-11-05
EP0689665A4 (en) * 1993-12-21 1998-05-13 Phase Metrics METHOD AND DEVICE FOR CALIBRATING INTENSITY AND DETECTING THE FRINGER FOLDER FOR THE INTERFEROMETRIC MEASUREMENT OF SMALL SPACES

Also Published As

Publication number Publication date
JPH0452401B2 (enrdf_load_stackoverflow) 1992-08-21

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