JPS5922220A - 磁気ディスク媒体用基板 - Google Patents
磁気ディスク媒体用基板Info
- Publication number
- JPS5922220A JPS5922220A JP57130456A JP13045682A JPS5922220A JP S5922220 A JPS5922220 A JP S5922220A JP 57130456 A JP57130456 A JP 57130456A JP 13045682 A JP13045682 A JP 13045682A JP S5922220 A JPS5922220 A JP S5922220A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- etching
- mirror
- accuracy
- recessed part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 46
- 229910000838 Al alloy Inorganic materials 0.000 claims abstract description 11
- 238000001020 plasma etching Methods 0.000 claims abstract description 8
- 239000010409 thin film Substances 0.000 claims description 7
- 238000005530 etching Methods 0.000 abstract description 12
- 238000000034 method Methods 0.000 abstract description 4
- 238000005498 polishing Methods 0.000 abstract description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- 239000004411 aluminium Substances 0.000 abstract 1
- 238000001179 sorption measurement Methods 0.000 description 10
- 230000003746 surface roughness Effects 0.000 description 7
- 239000010408 film Substances 0.000 description 6
- 239000000314 lubricant Substances 0.000 description 4
- 239000007789 gas Substances 0.000 description 3
- 239000010687 lubricating oil Substances 0.000 description 2
- 238000005461 lubrication Methods 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- 241000239290 Araneae Species 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910001566 austenite Inorganic materials 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000005923 long-lasting effect Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910006297 γ-Fe2O3 Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/7368—Non-polymeric layer under the lowermost magnetic recording layer
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/739—Magnetic recording media substrates
- G11B5/73911—Inorganic substrates
- G11B5/73917—Metallic substrates, i.e. elemental metal or metal alloy substrates
- G11B5/73919—Aluminium or titanium elemental or alloy substrates
Landscapes
- Engineering & Computer Science (AREA)
- Metallurgy (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57130456A JPS5922220A (ja) | 1982-07-28 | 1982-07-28 | 磁気ディスク媒体用基板 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57130456A JPS5922220A (ja) | 1982-07-28 | 1982-07-28 | 磁気ディスク媒体用基板 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5922220A true JPS5922220A (ja) | 1984-02-04 |
| JPH0130226B2 JPH0130226B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-06-16 |
Family
ID=15034668
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57130456A Granted JPS5922220A (ja) | 1982-07-28 | 1982-07-28 | 磁気ディスク媒体用基板 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5922220A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6476422A (en) * | 1987-09-16 | 1989-03-22 | Fuji Electric Co Ltd | Magnetic disk |
| JPH0191319A (ja) * | 1987-09-30 | 1989-04-11 | Noboru Tsuya | 磁気ディスクの製造方法 |
-
1982
- 1982-07-28 JP JP57130456A patent/JPS5922220A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6476422A (en) * | 1987-09-16 | 1989-03-22 | Fuji Electric Co Ltd | Magnetic disk |
| JPH0191319A (ja) * | 1987-09-30 | 1989-04-11 | Noboru Tsuya | 磁気ディスクの製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0130226B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-06-16 |
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