JPS59219476A - エツチング装置 - Google Patents
エツチング装置Info
- Publication number
- JPS59219476A JPS59219476A JP9102583A JP9102583A JPS59219476A JP S59219476 A JPS59219476 A JP S59219476A JP 9102583 A JP9102583 A JP 9102583A JP 9102583 A JP9102583 A JP 9102583A JP S59219476 A JPS59219476 A JP S59219476A
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- tank
- etching
- plate
- reaction tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 title claims abstract description 29
- 239000007788 liquid Substances 0.000 claims abstract description 70
- 239000006185 dispersion Substances 0.000 claims description 6
- 230000035611 feeding Effects 0.000 claims 1
- 230000001105 regulatory effect Effects 0.000 abstract 2
- 235000012431 wafers Nutrition 0.000 description 17
- 238000003756 stirring Methods 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- 239000007795 chemical reaction product Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9102583A JPS59219476A (ja) | 1983-05-24 | 1983-05-24 | エツチング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9102583A JPS59219476A (ja) | 1983-05-24 | 1983-05-24 | エツチング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59219476A true JPS59219476A (ja) | 1984-12-10 |
| JPS6340867B2 JPS6340867B2 (enExample) | 1988-08-12 |
Family
ID=14014984
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9102583A Granted JPS59219476A (ja) | 1983-05-24 | 1983-05-24 | エツチング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59219476A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0555192A (ja) * | 1991-08-27 | 1993-03-05 | Mitsubishi Electric Corp | ウエハ等の薄板体の表面処理装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7099282B2 (ja) | 2018-11-26 | 2022-07-12 | 株式会社Ｊｖｃケンウッド | ヘッドマウントディスプレイシステム |
-
1983
- 1983-05-24 JP JP9102583A patent/JPS59219476A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0555192A (ja) * | 1991-08-27 | 1993-03-05 | Mitsubishi Electric Corp | ウエハ等の薄板体の表面処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6340867B2 (enExample) | 1988-08-12 |
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