JPS59212701A - パタ−ンマツチングによる位置認識方法 - Google Patents
パタ−ンマツチングによる位置認識方法Info
- Publication number
- JPS59212701A JPS59212701A JP8691883A JP8691883A JPS59212701A JP S59212701 A JPS59212701 A JP S59212701A JP 8691883 A JP8691883 A JP 8691883A JP 8691883 A JP8691883 A JP 8691883A JP S59212701 A JPS59212701 A JP S59212701A
- Authority
- JP
- Japan
- Prior art keywords
- matching
- degree
- point
- pattern
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 18
- 238000003384 imaging method Methods 0.000 claims description 7
- 238000003860 storage Methods 0.000 abstract description 24
- 238000001514 detection method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 238000005520 cutting process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 2
- 238000007781 pre-processing Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012567 pattern recognition method Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8691883A JPS59212701A (ja) | 1983-05-18 | 1983-05-18 | パタ−ンマツチングによる位置認識方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8691883A JPS59212701A (ja) | 1983-05-18 | 1983-05-18 | パタ−ンマツチングによる位置認識方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59212701A true JPS59212701A (ja) | 1984-12-01 |
| JPH0522164B2 JPH0522164B2 (enrdf_load_stackoverflow) | 1993-03-26 |
Family
ID=13900231
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8691883A Granted JPS59212701A (ja) | 1983-05-18 | 1983-05-18 | パタ−ンマツチングによる位置認識方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59212701A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001516768A (ja) * | 1997-09-23 | 2001-10-02 | ハッサネイン，ワリード，エイチ． | 臓器を維持するための組成物、方法及び装置 |
-
1983
- 1983-05-18 JP JP8691883A patent/JPS59212701A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001516768A (ja) * | 1997-09-23 | 2001-10-02 | ハッサネイン，ワリード，エイチ． | 臓器を維持するための組成物、方法及び装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0522164B2 (enrdf_load_stackoverflow) | 1993-03-26 |
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