JPS59208803A - 厚膜型正特性半導体素子の製造方法 - Google Patents

Info

Publication number

JPS59208803A

JPS59208803A JP8444183A JP8444183A JPS59208803A JP S59208803 A JPS59208803 A JP S59208803A JP 8444183 A JP8444183 A JP 8444183A JP 8444183 A JP8444183 A JP 8444183A JP S59208803 A JPS59208803 A JP S59208803A

Authority

JP

Japan

Prior art keywords

thick film

positive temperature

semiconductor element

semiconductor

temperature coefficient

Prior art date

1983-05-13

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

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• 239000004065 semiconductor Substances 0.000 title claims description 28
• 238000000034 method Methods 0.000 title claims description 13
• 239000000203 mixture Substances 0.000 claims description 7
• 238000004519 manufacturing process Methods 0.000 claims description 6
• 239000000758 substrate Substances 0.000 claims description 6
• 238000010304 firing Methods 0.000 claims description 3
• 239000011521 glass Substances 0.000 description 17
• 239000010408 film Substances 0.000 description 16
• 238000010438 heat treatment Methods 0.000 description 12
• 239000000843 powder Substances 0.000 description 10
• 239000002482 conductive additive Substances 0.000 description 7
• 239000002245 particle Substances 0.000 description 6
• 229910002113 barium titanate Inorganic materials 0.000 description 4
• 230000000694 effects Effects 0.000 description 3
• 230000035939 shock Effects 0.000 description 3
• 239000004020 conductor Substances 0.000 description 2
• 238000001035 drying Methods 0.000 description 2
• 239000000463 material Substances 0.000 description 2
• 238000002156 mixing Methods 0.000 description 2
• 230000003287 optical effect Effects 0.000 description 2
• 238000010298 pulverizing process Methods 0.000 description 2
• 238000007650 screen-printing Methods 0.000 description 2
• WUOACPNHFRMFPN-SECBINFHSA-N (S)-(-)-alpha-terpineol Chemical compound CC1=CC[C@@H](C(C)(C)O)CC1 WUOACPNHFRMFPN-SECBINFHSA-N 0.000 description 1
• MQIUGAXCHLFZKX-UHFFFAOYSA-N Di-n-octyl phthalate Natural products CCCCCCCCOC(=O)C1=CC=CC=C1C(=O)OCCCCCCCC MQIUGAXCHLFZKX-UHFFFAOYSA-N 0.000 description 1
• 239000002202 Polyethylene glycol Substances 0.000 description 1
• 239000000654 additive Substances 0.000 description 1
• OVKDFILSBMEKLT-UHFFFAOYSA-N alpha-Terpineol Natural products CC(=C)C1(O)CCC(C)=CC1 OVKDFILSBMEKLT-UHFFFAOYSA-N 0.000 description 1
• 229940088601 alpha-terpineol Drugs 0.000 description 1
• BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 1
• 238000007796 conventional method Methods 0.000 description 1
• 239000013078 crystal Substances 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 238000009413 insulation Methods 0.000 description 1
• 238000000465 moulding Methods 0.000 description 1
• 239000003960 organic solvent Substances 0.000 description 1
• 230000003647 oxidation Effects 0.000 description 1
• 238000007254 oxidation reaction Methods 0.000 description 1
• 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
• 229920001223 polyethylene glycol Polymers 0.000 description 1
• 239000002904 solvent Substances 0.000 description 1
• 239000000126 substance Substances 0.000 description 1
• 230000008719 thickening Effects 0.000 description 1
• 239000010409 thin film Substances 0.000 description 1
• 238000001771 vacuum deposition Methods 0.000 description 1