JPH0534805B2 - - Google Patents

Info

Publication number

JPH0534805B2

JPH0534805B2 JP11702084A JP11702084A JPH0534805B2 JP H0534805 B2 JPH0534805 B2 JP H0534805B2 JP 11702084 A JP11702084 A JP 11702084A JP 11702084 A JP11702084 A JP 11702084A JP H0534805 B2 JPH0534805 B2 JP H0534805B2

Authority

JP

Japan

Prior art keywords

cosi

batio

powder

glass frit

thick film

Prior art date

1984-06-07

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired - Lifetime

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 30
• 229910019001 CoSi Inorganic materials 0.000 claims description 25
• 239000000843 powder Substances 0.000 claims description 19
• 238000000034 method Methods 0.000 claims description 9
• 239000000203 mixture Substances 0.000 claims description 9
• 238000004519 manufacturing process Methods 0.000 claims description 8
• 239000000758 substrate Substances 0.000 claims description 7
• 239000011521 glass Substances 0.000 description 18
• 239000010408 film Substances 0.000 description 17
• 238000010438 heat treatment Methods 0.000 description 11
• 239000002482 conductive additive Substances 0.000 description 7
• 239000002245 particle Substances 0.000 description 4
• 230000035939 shock Effects 0.000 description 4
• WUOACPNHFRMFPN-SECBINFHSA-N (S)-(-)-alpha-terpineol Chemical compound CC1=CC[C@@H](C(C)(C)O)CC1 WUOACPNHFRMFPN-SECBINFHSA-N 0.000 description 3
• OVKDFILSBMEKLT-UHFFFAOYSA-N alpha-Terpineol Natural products CC(=C)C1(O)CCC(C)=CC1 OVKDFILSBMEKLT-UHFFFAOYSA-N 0.000 description 3
• 229940088601 alpha-terpineol Drugs 0.000 description 3
• 230000000694 effects Effects 0.000 description 3
• 238000010304 firing Methods 0.000 description 3
• 239000002184 metal Substances 0.000 description 3
• 238000007650 screen-printing Methods 0.000 description 3
• 229910004298 SiO 2 Inorganic materials 0.000 description 2
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
• 239000004020 conductor Substances 0.000 description 2
• 239000000463 material Substances 0.000 description 2
• 239000011863 silicon-based powder Substances 0.000 description 2
• 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
• 229910021244 Co2Si Inorganic materials 0.000 description 1
• 229910018999 CoSi2 Inorganic materials 0.000 description 1
• 239000000654 additive Substances 0.000 description 1
• 239000011248 coating agent Substances 0.000 description 1
• 238000000576 coating method Methods 0.000 description 1
• 229910052681 coesite Inorganic materials 0.000 description 1
• 238000007796 conventional method Methods 0.000 description 1
• 229910052906 cristobalite Inorganic materials 0.000 description 1
• 239000013078 crystal Substances 0.000 description 1
• 238000000354 decomposition reaction Methods 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 238000002474 experimental method Methods 0.000 description 1
• 238000009413 insulation Methods 0.000 description 1
• 238000000465 moulding Methods 0.000 description 1
• 239000003960 organic solvent Substances 0.000 description 1
• 239000002244 precipitate Substances 0.000 description 1
• 238000010298 pulverizing process Methods 0.000 description 1
• 239000000377 silicon dioxide Substances 0.000 description 1
• 235000012239 silicon dioxide Nutrition 0.000 description 1
• 239000002904 solvent Substances 0.000 description 1
• 229910052682 stishovite Inorganic materials 0.000 description 1
• 239000010409 thin film Substances 0.000 description 1
• 229910052905 tridymite Inorganic materials 0.000 description 1
• 238000007738 vacuum evaporation Methods 0.000 description 1