JPH04564B2 - - Google Patents

Info

Publication number

JPH04564B2

JPH04564B2 JP17345083A JP17345083A JPH04564B2 JP H04564 B2 JPH04564 B2 JP H04564B2 JP 17345083 A JP17345083 A JP 17345083A JP 17345083 A JP17345083 A JP 17345083A JP H04564 B2 JPH04564 B2 JP H04564B2

Authority

JP

Japan

Prior art keywords

batio

thick film

glass frit

powder

tasi

Prior art date

1983-09-19

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

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• 239000004065 semiconductor Substances 0.000 claims description 30
• 239000000203 mixture Substances 0.000 claims description 11
• 238000000034 method Methods 0.000 claims description 9
• 238000004519 manufacturing process Methods 0.000 claims description 8
• 239000000758 substrate Substances 0.000 claims description 7
• 238000010304 firing Methods 0.000 claims description 3
• 239000000843 powder Substances 0.000 description 18
• 239000010408 film Substances 0.000 description 17
• 239000011521 glass Substances 0.000 description 17
• 238000010438 heat treatment Methods 0.000 description 12
• 239000002482 conductive additive Substances 0.000 description 7
• 230000000694 effects Effects 0.000 description 4
• 230000035939 shock Effects 0.000 description 4
• WUOACPNHFRMFPN-SECBINFHSA-N (S)-(-)-alpha-terpineol Chemical compound CC1=CC[C@@H](C(C)(C)O)CC1 WUOACPNHFRMFPN-SECBINFHSA-N 0.000 description 3
• 229910004298 SiO 2 Inorganic materials 0.000 description 3
• OVKDFILSBMEKLT-UHFFFAOYSA-N alpha-Terpineol Natural products CC(=C)C1(O)CCC(C)=CC1 OVKDFILSBMEKLT-UHFFFAOYSA-N 0.000 description 3
• 229940088601 alpha-terpineol Drugs 0.000 description 3
• 239000002184 metal Substances 0.000 description 3
• 239000002245 particle Substances 0.000 description 3
• 238000007650 screen-printing Methods 0.000 description 3
• 229910021193 La 2 O 3 Inorganic materials 0.000 description 2
• 239000004020 conductor Substances 0.000 description 2
• 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
• 239000000654 additive Substances 0.000 description 1
• 229910002113 barium titanate Inorganic materials 0.000 description 1
• 238000007796 conventional method Methods 0.000 description 1
• 239000013078 crystal Substances 0.000 description 1
• 238000000354 decomposition reaction Methods 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 238000009413 insulation Methods 0.000 description 1
• 239000000463 material Substances 0.000 description 1
• 238000000465 moulding Methods 0.000 description 1
• 239000003960 organic solvent Substances 0.000 description 1
• 239000002244 precipitate Substances 0.000 description 1
• 238000002360 preparation method Methods 0.000 description 1
• 239000000047 product Substances 0.000 description 1
• 238000010298 pulverizing process Methods 0.000 description 1
• 239000011863 silicon-based powder Substances 0.000 description 1
• 239000002904 solvent Substances 0.000 description 1
• 239000010409 thin film Substances 0.000 description 1
• 238000007738 vacuum evaporation Methods 0.000 description 1