JPS5920840A - 欠陥検査装置 - Google Patents

欠陥検査装置

Info

Publication number
JPS5920840A
JPS5920840A JP13179882A JP13179882A JPS5920840A JP S5920840 A JPS5920840 A JP S5920840A JP 13179882 A JP13179882 A JP 13179882A JP 13179882 A JP13179882 A JP 13179882A JP S5920840 A JPS5920840 A JP S5920840A
Authority
JP
Japan
Prior art keywords
inspected
photodetector
light
sample
defect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13179882A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0447782B2 (enrdf_load_stackoverflow
Inventor
Kikuo Mita
三田　喜久夫
Moritoshi Ando
護俊 安藤
Giichi Kakigi
柿木　義一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP13179882A priority Critical patent/JPS5920840A/ja
Publication of JPS5920840A publication Critical patent/JPS5920840A/ja
Publication of JPH0447782B2 publication Critical patent/JPH0447782B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95692—Patterns showing hole parts, e.g. honeycomb filtering structures

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP13179882A 1982-07-28 1982-07-28 欠陥検査装置 Granted JPS5920840A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13179882A JPS5920840A (ja) 1982-07-28 1982-07-28 欠陥検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13179882A JPS5920840A (ja) 1982-07-28 1982-07-28 欠陥検査装置

Publications (2)

Publication Number Publication Date
JPS5920840A true JPS5920840A (ja) 1984-02-02
JPH0447782B2 JPH0447782B2 (enrdf_load_stackoverflow) 1992-08-04

Family

ID=15066359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13179882A Granted JPS5920840A (ja) 1982-07-28 1982-07-28 欠陥検査装置

Country Status (1)

Country Link
JP (1) JPS5920840A (enrdf_load_stackoverflow)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5999364A (ja) * 1982-11-30 1984-06-08 Fujitsu Ltd スル−ホ−ル検査装置
JPS59150329A (ja) * 1983-01-28 1984-08-28 Fujitsu Ltd スル−ホ−ル検査装置
JPS62297750A (ja) * 1986-06-17 1987-12-24 Matsushita Electric Ind Co Ltd ハンダ付け検査装置
JPS62299747A (ja) * 1986-06-19 1987-12-26 Fujitsu Ltd スル−ホ−ル検査装置
JPH0455991U (enrdf_load_stackoverflow) * 1990-09-19 1992-05-13
US5548400A (en) * 1994-02-16 1996-08-20 Sochata Method and apparatus for inspecting honeycomb structures using optical fibres
EP0997722A1 (fr) * 1998-10-29 2000-05-03 Societe Nationale D'etude Et De Construction De Moteurs D'aviation "Snecma" Procédé et instrument de contrôle de la liaison de l'âme alvéolée d'un nid d'abeilles sur une peau

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53143384A (en) * 1977-05-20 1978-12-13 Yaskawa Denki Seisakusho Kk Pinhole detector
JPS5444769A (en) * 1977-09-14 1979-04-09 Matsushita Electric Ind Co Ltd Device for inspecting displacement of chipplike parts
JPS54141661A (en) * 1978-04-27 1979-11-05 Fujitsu Ltd Assignment system of inspection area

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53143384A (en) * 1977-05-20 1978-12-13 Yaskawa Denki Seisakusho Kk Pinhole detector
JPS5444769A (en) * 1977-09-14 1979-04-09 Matsushita Electric Ind Co Ltd Device for inspecting displacement of chipplike parts
JPS54141661A (en) * 1978-04-27 1979-11-05 Fujitsu Ltd Assignment system of inspection area

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5999364A (ja) * 1982-11-30 1984-06-08 Fujitsu Ltd スル−ホ−ル検査装置
JPS59150329A (ja) * 1983-01-28 1984-08-28 Fujitsu Ltd スル−ホ−ル検査装置
JPS62297750A (ja) * 1986-06-17 1987-12-24 Matsushita Electric Ind Co Ltd ハンダ付け検査装置
JPS62299747A (ja) * 1986-06-19 1987-12-26 Fujitsu Ltd スル−ホ−ル検査装置
JPH0455991U (enrdf_load_stackoverflow) * 1990-09-19 1992-05-13
US5548400A (en) * 1994-02-16 1996-08-20 Sochata Method and apparatus for inspecting honeycomb structures using optical fibres
EP0997722A1 (fr) * 1998-10-29 2000-05-03 Societe Nationale D'etude Et De Construction De Moteurs D'aviation "Snecma" Procédé et instrument de contrôle de la liaison de l'âme alvéolée d'un nid d'abeilles sur une peau
FR2785388A1 (fr) * 1998-10-29 2000-05-05 Snecma Procede et instrument de controle de la liaison de l'ame alveolee d'un nid d'abeilles sur une peau

Also Published As

Publication number Publication date
JPH0447782B2 (enrdf_load_stackoverflow) 1992-08-04

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