JPS59207874A - 窒化珪素中空体の製造方法 - Google Patents

窒化珪素中空体の製造方法

Info

Publication number
JPS59207874A
JPS59207874A JP58081250A JP8125083A JPS59207874A JP S59207874 A JPS59207874 A JP S59207874A JP 58081250 A JP58081250 A JP 58081250A JP 8125083 A JP8125083 A JP 8125083A JP S59207874 A JPS59207874 A JP S59207874A
Authority
JP
Japan
Prior art keywords
silicon nitride
silicon
surface layer
hollow
sintered body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58081250A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0513906B2 (enrdf_load_stackoverflow
Inventor
草加　勝司
市川　二朗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daido Steel Co Ltd
Original Assignee
Daido Steel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daido Steel Co Ltd filed Critical Daido Steel Co Ltd
Priority to JP58081250A priority Critical patent/JPS59207874A/ja
Publication of JPS59207874A publication Critical patent/JPS59207874A/ja
Publication of JPH0513906B2 publication Critical patent/JPH0513906B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ceramic Products (AREA)
JP58081250A 1983-05-10 1983-05-10 窒化珪素中空体の製造方法 Granted JPS59207874A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58081250A JPS59207874A (ja) 1983-05-10 1983-05-10 窒化珪素中空体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58081250A JPS59207874A (ja) 1983-05-10 1983-05-10 窒化珪素中空体の製造方法

Publications (2)

Publication Number Publication Date
JPS59207874A true JPS59207874A (ja) 1984-11-26
JPH0513906B2 JPH0513906B2 (enrdf_load_stackoverflow) 1993-02-23

Family

ID=13741141

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58081250A Granted JPS59207874A (ja) 1983-05-10 1983-05-10 窒化珪素中空体の製造方法

Country Status (1)

Country Link
JP (1) JPS59207874A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4943401A (en) * 1987-12-21 1990-07-24 Eaton Corporation Process for making silicon nitride articles
US11729907B2 (en) 2019-09-18 2023-08-15 Kabushiki Kaisha Toshiba Structure and circuit board

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5621749A (en) * 1979-07-26 1981-02-28 Mitsubishi Electric Corp Detector for abnormality of tool
JPS57200269A (en) * 1981-06-05 1982-12-08 Daido Steel Co Ltd Manufacture of silicon nitrogen reaction sintered body

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5621749A (en) * 1979-07-26 1981-02-28 Mitsubishi Electric Corp Detector for abnormality of tool
JPS57200269A (en) * 1981-06-05 1982-12-08 Daido Steel Co Ltd Manufacture of silicon nitrogen reaction sintered body

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4943401A (en) * 1987-12-21 1990-07-24 Eaton Corporation Process for making silicon nitride articles
US11729907B2 (en) 2019-09-18 2023-08-15 Kabushiki Kaisha Toshiba Structure and circuit board

Also Published As

Publication number Publication date
JPH0513906B2 (enrdf_load_stackoverflow) 1993-02-23

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