JPS59201421A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS59201421A
JPS59201421A JP58076543A JP7654383A JPS59201421A JP S59201421 A JPS59201421 A JP S59201421A JP 58076543 A JP58076543 A JP 58076543A JP 7654383 A JP7654383 A JP 7654383A JP S59201421 A JPS59201421 A JP S59201421A
Authority
JP
Japan
Prior art keywords
film
resist
amorphous
silicon
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58076543A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0410220B2 (OSRAM
Inventor
Ryoichi Mukai
良一 向井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP58076543A priority Critical patent/JPS59201421A/ja
Publication of JPS59201421A publication Critical patent/JPS59201421A/ja
Publication of JPH0410220B2 publication Critical patent/JPH0410220B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/00—

Landscapes

  • Drying Of Semiconductors (AREA)
  • Weting (AREA)
JP58076543A 1983-04-30 1983-04-30 半導体装置の製造方法 Granted JPS59201421A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58076543A JPS59201421A (ja) 1983-04-30 1983-04-30 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58076543A JPS59201421A (ja) 1983-04-30 1983-04-30 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS59201421A true JPS59201421A (ja) 1984-11-15
JPH0410220B2 JPH0410220B2 (OSRAM) 1992-02-24

Family

ID=13608179

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58076543A Granted JPS59201421A (ja) 1983-04-30 1983-04-30 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS59201421A (OSRAM)

Also Published As

Publication number Publication date
JPH0410220B2 (OSRAM) 1992-02-24

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