JPH0410220B2 - - Google Patents

Info

Publication number
JPH0410220B2
JPH0410220B2 JP58076543A JP7654383A JPH0410220B2 JP H0410220 B2 JPH0410220 B2 JP H0410220B2 JP 58076543 A JP58076543 A JP 58076543A JP 7654383 A JP7654383 A JP 7654383A JP H0410220 B2 JPH0410220 B2 JP H0410220B2
Authority
JP
Japan
Prior art keywords
film
silicon film
resist
polycrystalline silicon
amorphous silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58076543A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59201421A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP58076543A priority Critical patent/JPS59201421A/ja
Publication of JPS59201421A publication Critical patent/JPS59201421A/ja
Publication of JPH0410220B2 publication Critical patent/JPH0410220B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/00—

Landscapes

  • Drying Of Semiconductors (AREA)
  • Weting (AREA)
JP58076543A 1983-04-30 1983-04-30 半導体装置の製造方法 Granted JPS59201421A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58076543A JPS59201421A (ja) 1983-04-30 1983-04-30 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58076543A JPS59201421A (ja) 1983-04-30 1983-04-30 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS59201421A JPS59201421A (ja) 1984-11-15
JPH0410220B2 true JPH0410220B2 (OSRAM) 1992-02-24

Family

ID=13608179

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58076543A Granted JPS59201421A (ja) 1983-04-30 1983-04-30 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS59201421A (OSRAM)

Also Published As

Publication number Publication date
JPS59201421A (ja) 1984-11-15

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