JPH0410221B2 - - Google Patents

Info

Publication number
JPH0410221B2
JPH0410221B2 JP58076544A JP7654483A JPH0410221B2 JP H0410221 B2 JPH0410221 B2 JP H0410221B2 JP 58076544 A JP58076544 A JP 58076544A JP 7654483 A JP7654483 A JP 7654483A JP H0410221 B2 JPH0410221 B2 JP H0410221B2
Authority
JP
Japan
Prior art keywords
film
amorphous silicon
silicon film
silicon
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58076544A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59201422A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP58076544A priority Critical patent/JPS59201422A/ja
Publication of JPS59201422A publication Critical patent/JPS59201422A/ja
Publication of JPH0410221B2 publication Critical patent/JPH0410221B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/00—

Landscapes

  • Drying Of Semiconductors (AREA)
  • Weting (AREA)
JP58076544A 1983-04-30 1983-04-30 半導体装置の製造方法 Granted JPS59201422A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58076544A JPS59201422A (ja) 1983-04-30 1983-04-30 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58076544A JPS59201422A (ja) 1983-04-30 1983-04-30 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS59201422A JPS59201422A (ja) 1984-11-15
JPH0410221B2 true JPH0410221B2 (OSRAM) 1992-02-24

Family

ID=13608204

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58076544A Granted JPS59201422A (ja) 1983-04-30 1983-04-30 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS59201422A (OSRAM)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1560691B (zh) 1992-08-27 2010-05-26 株式会社半导体能源研究所 半导体器件及其制造方法和有源矩阵显示器
JPH1056180A (ja) * 1995-09-29 1998-02-24 Canon Inc 半導体装置及びその製造方法
KR100954332B1 (ko) 2003-06-30 2010-04-21 엘지디스플레이 주식회사 액정표시소자와 그 제조방법
JP2018037628A (ja) * 2016-08-31 2018-03-08 国立大学法人島根大学 パターニング方法、薄膜トランジスタ作製方法、および、パターニング装置

Also Published As

Publication number Publication date
JPS59201422A (ja) 1984-11-15

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