JPS59197391A - レ−ザ加工方法 - Google Patents

レ−ザ加工方法

Info

Publication number
JPS59197391A
JPS59197391A JP58072558A JP7255883A JPS59197391A JP S59197391 A JPS59197391 A JP S59197391A JP 58072558 A JP58072558 A JP 58072558A JP 7255883 A JP7255883 A JP 7255883A JP S59197391 A JPS59197391 A JP S59197391A
Authority
JP
Japan
Prior art keywords
groove
laser
light
processed
halogen element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58072558A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0426957B2 (enExample
Inventor
Shunpei Yamazaki
舜平 山崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP58072558A priority Critical patent/JPS59197391A/ja
Publication of JPS59197391A publication Critical patent/JPS59197391A/ja
Publication of JPH0426957B2 publication Critical patent/JPH0426957B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/127—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an enclosure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/362—Laser etching
    • B23K26/364—Laser etching for making a groove or trench, e.g. for scribing a break initiation groove

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Photovoltaic Devices (AREA)
JP58072558A 1983-04-25 1983-04-25 レ−ザ加工方法 Granted JPS59197391A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58072558A JPS59197391A (ja) 1983-04-25 1983-04-25 レ−ザ加工方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58072558A JPS59197391A (ja) 1983-04-25 1983-04-25 レ−ザ加工方法

Publications (2)

Publication Number Publication Date
JPS59197391A true JPS59197391A (ja) 1984-11-08
JPH0426957B2 JPH0426957B2 (enExample) 1992-05-08

Family

ID=13492803

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58072558A Granted JPS59197391A (ja) 1983-04-25 1983-04-25 レ−ザ加工方法

Country Status (1)

Country Link
JP (1) JPS59197391A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997024768A1 (en) * 1995-12-29 1997-07-10 Pacific Solar Pty. Limited Improved laser grooving and doping method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5582780A (en) * 1978-12-16 1980-06-21 Toshiba Corp Surface processing method for metal or the like article

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5582780A (en) * 1978-12-16 1980-06-21 Toshiba Corp Surface processing method for metal or the like article

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997024768A1 (en) * 1995-12-29 1997-07-10 Pacific Solar Pty. Limited Improved laser grooving and doping method

Also Published As

Publication number Publication date
JPH0426957B2 (enExample) 1992-05-08

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