JPS59184519A - イオン化クラスタビーム発生方法 - Google Patents

イオン化クラスタビーム発生方法

Info

Publication number
JPS59184519A
JPS59184519A JP58058733A JP5873383A JPS59184519A JP S59184519 A JPS59184519 A JP S59184519A JP 58058733 A JP58058733 A JP 58058733A JP 5873383 A JP5873383 A JP 5873383A JP S59184519 A JPS59184519 A JP S59184519A
Authority
JP
Japan
Prior art keywords
container
nozzle
cluster beam
gas
deposited
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58058733A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0343771B2 (enExample
Inventor
Shinichi Ogawa
真一 小川
Koichi Kugimiya
公一 釘宮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP58058733A priority Critical patent/JPS59184519A/ja
Publication of JPS59184519A publication Critical patent/JPS59184519A/ja
Publication of JPH0343771B2 publication Critical patent/JPH0343771B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/24—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using chemical vapour deposition [CVD]

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP58058733A 1983-04-05 1983-04-05 イオン化クラスタビーム発生方法 Granted JPS59184519A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58058733A JPS59184519A (ja) 1983-04-05 1983-04-05 イオン化クラスタビーム発生方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58058733A JPS59184519A (ja) 1983-04-05 1983-04-05 イオン化クラスタビーム発生方法

Publications (2)

Publication Number Publication Date
JPS59184519A true JPS59184519A (ja) 1984-10-19
JPH0343771B2 JPH0343771B2 (enExample) 1991-07-03

Family

ID=13092704

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58058733A Granted JPS59184519A (ja) 1983-04-05 1983-04-05 イオン化クラスタビーム発生方法

Country Status (1)

Country Link
JP (1) JPS59184519A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0242067U (enExample) * 1988-09-19 1990-03-23

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50105550A (enExample) * 1973-12-11 1975-08-20
JPS5121472A (enExample) * 1974-08-16 1976-02-20 Hitachi Ltd
JPS5132423A (en) * 1974-09-14 1976-03-19 Nissan Chemical Ind Ltd Igata no sakuseiho
JPS5547452A (en) * 1978-07-27 1980-04-03 Cremer Device for measuring speed of automobile

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50105550A (enExample) * 1973-12-11 1975-08-20
JPS5121472A (enExample) * 1974-08-16 1976-02-20 Hitachi Ltd
JPS5132423A (en) * 1974-09-14 1976-03-19 Nissan Chemical Ind Ltd Igata no sakuseiho
JPS5547452A (en) * 1978-07-27 1980-04-03 Cremer Device for measuring speed of automobile

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0242067U (enExample) * 1988-09-19 1990-03-23

Also Published As

Publication number Publication date
JPH0343771B2 (enExample) 1991-07-03

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