JPS59178367U - スパツタリング装置 - Google Patents

スパツタリング装置

Info

Publication number
JPS59178367U
JPS59178367U JP6973183U JP6973183U JPS59178367U JP S59178367 U JPS59178367 U JP S59178367U JP 6973183 U JP6973183 U JP 6973183U JP 6973183 U JP6973183 U JP 6973183U JP S59178367 U JPS59178367 U JP S59178367U
Authority
JP
Japan
Prior art keywords
substrate holder
anode
cathode
sputtered particles
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6973183U
Other languages
English (en)
Japanese (ja)
Other versions
JPS629320Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
今岡　英一郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu General Ltd
Original Assignee
Fujitsu General Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu General Ltd filed Critical Fujitsu General Ltd
Priority to JP6973183U priority Critical patent/JPS59178367U/ja
Publication of JPS59178367U publication Critical patent/JPS59178367U/ja
Application granted granted Critical
Publication of JPS629320Y2 publication Critical patent/JPS629320Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP6973183U 1983-05-10 1983-05-10 スパツタリング装置 Granted JPS59178367U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6973183U JPS59178367U (ja) 1983-05-10 1983-05-10 スパツタリング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6973183U JPS59178367U (ja) 1983-05-10 1983-05-10 スパツタリング装置

Publications (2)

Publication Number Publication Date
JPS59178367U true JPS59178367U (ja) 1984-11-29
JPS629320Y2 JPS629320Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-03-04

Family

ID=30199883

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6973183U Granted JPS59178367U (ja) 1983-05-10 1983-05-10 スパツタリング装置

Country Status (1)

Country Link
JP (1) JPS59178367U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009531544A (ja) * 2006-03-28 2009-09-03 ナムローゼ・フェンノートシャップ・ベーカート・ソシエテ・アノニム スパッタリング装置
JP2009531545A (ja) * 2006-03-28 2009-09-03 ナムローゼ・フェンノートシャップ・ベーカート・ソシエテ・アノニム コーティング装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5582778A (en) * 1978-12-19 1980-06-21 Nippon Denso Co Ltd Sputtering apparatus
JPS55100979A (en) * 1979-01-23 1980-08-01 Fujitsu General Ltd Sputtering apparatus
JPS55180761U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1979-06-12 1980-12-25

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5582778A (en) * 1978-12-19 1980-06-21 Nippon Denso Co Ltd Sputtering apparatus
JPS55100979A (en) * 1979-01-23 1980-08-01 Fujitsu General Ltd Sputtering apparatus
JPS55180761U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1979-06-12 1980-12-25

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009531544A (ja) * 2006-03-28 2009-09-03 ナムローゼ・フェンノートシャップ・ベーカート・ソシエテ・アノニム スパッタリング装置
JP2009531545A (ja) * 2006-03-28 2009-09-03 ナムローゼ・フェンノートシャップ・ベーカート・ソシエテ・アノニム コーティング装置
US9082595B2 (en) 2006-03-28 2015-07-14 Sulzer Metaplas Gmbh Sputtering apparatus

Also Published As

Publication number Publication date
JPS629320Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-03-04

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