JPS59176586A - 環状電気炉 - Google Patents
環状電気炉Info
- Publication number
- JPS59176586A JPS59176586A JP4863483A JP4863483A JPS59176586A JP S59176586 A JPS59176586 A JP S59176586A JP 4863483 A JP4863483 A JP 4863483A JP 4863483 A JP4863483 A JP 4863483A JP S59176586 A JPS59176586 A JP S59176586A
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- gas
- electric furnace
- cooling
- annular electric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001816 cooling Methods 0.000 claims description 19
- 238000010438 heat treatment Methods 0.000 claims description 17
- 238000009413 insulation Methods 0.000 claims description 11
- 239000012774 insulation material Substances 0.000 claims description 9
- 238000007664 blowing Methods 0.000 claims description 4
- 238000002791 soaking Methods 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 14
- 230000000694 effects Effects 0.000 description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 239000000835 fiber Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Landscapes
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4863483A JPS59176586A (ja) | 1983-03-25 | 1983-03-25 | 環状電気炉 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4863483A JPS59176586A (ja) | 1983-03-25 | 1983-03-25 | 環状電気炉 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59176586A true JPS59176586A (ja) | 1984-10-05 |
| JPS627470B2 JPS627470B2 (enrdf_load_stackoverflow) | 1987-02-17 |
Family
ID=12808801
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4863483A Granted JPS59176586A (ja) | 1983-03-25 | 1983-03-25 | 環状電気炉 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59176586A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014529722A (ja) * | 2011-09-06 | 2014-11-13 | アルサラン エマミＡｒｓａｌａｎ Ｅｍａｍｉ | 冷却能力を高めた加熱要素 |
-
1983
- 1983-03-25 JP JP4863483A patent/JPS59176586A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014529722A (ja) * | 2011-09-06 | 2014-11-13 | アルサラン エマミＡｒｓａｌａｎ Ｅｍａｍｉ | 冷却能力を高めた加熱要素 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS627470B2 (enrdf_load_stackoverflow) | 1987-02-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4085307B2 (ja) | 誘導加熱装置用の断熱性ガス密封且つ真空密封チャンバ | |
| JP2002277054A (ja) | 流体加熱装置 | |
| JPH04273990A (ja) | 加熱装置 | |
| CN117867474A (zh) | 一种薄膜沉积设备 | |
| US5323484A (en) | Heating apparatus with multilayer insulating structure | |
| US3842794A (en) | Apparatus for high temperature semiconductor processing | |
| JP4198901B2 (ja) | カーボンヒータ | |
| JPS59176586A (ja) | 環状電気炉 | |
| JP3383784B2 (ja) | 半導体ウェハの熱処理装置 | |
| JP2953744B2 (ja) | 熱処理装置 | |
| JP3881937B2 (ja) | 半導体製造装置または加熱装置 | |
| US3112389A (en) | Unit brazing fixture | |
| JPS63284787A (ja) | 撚線ヒ−タおよび半導体熱処理装置 | |
| JP2573102B2 (ja) | 加熱炉の炉壁 | |
| JPS61227169A (ja) | スパツタリング装置 | |
| JP2670513B2 (ja) | 加熱装置 | |
| JPH0517143Y2 (enrdf_load_stackoverflow) | ||
| CN222670660U (zh) | 一种卧式高温中频炉保温结构 | |
| CN221505613U (zh) | 一种高温炉底支撑不下沉耐火结构 | |
| CN216954037U (zh) | 一种低温管式炉体 | |
| JPH06168899A (ja) | 基板加熱用ヒータユニット | |
| JPS638128Y2 (enrdf_load_stackoverflow) | ||
| JPH0468296A (ja) | 半導体製造装置 | |
| JPS5833083A (ja) | 熱処理炉 | |
| CN201990766U (zh) | 扩散炉用炉体及扩散炉 |