JPS627470B2 - - Google Patents
Info
- Publication number
- JPS627470B2 JPS627470B2 JP4863483A JP4863483A JPS627470B2 JP S627470 B2 JPS627470 B2 JP S627470B2 JP 4863483 A JP4863483 A JP 4863483A JP 4863483 A JP4863483 A JP 4863483A JP S627470 B2 JPS627470 B2 JP S627470B2
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- gas
- cooling
- heat
- heating element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001816 cooling Methods 0.000 claims description 18
- 238000010438 heat treatment Methods 0.000 claims description 18
- 239000012774 insulation material Substances 0.000 claims description 7
- 238000002791 soaking Methods 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 16
- 238000009413 insulation Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 239000011810 insulating material Substances 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 4
- 238000007664 blowing Methods 0.000 description 3
- 239000000835 fiber Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4863483A JPS59176586A (ja) | 1983-03-25 | 1983-03-25 | 環状電気炉 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4863483A JPS59176586A (ja) | 1983-03-25 | 1983-03-25 | 環状電気炉 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59176586A JPS59176586A (ja) | 1984-10-05 |
| JPS627470B2 true JPS627470B2 (enrdf_load_stackoverflow) | 1987-02-17 |
Family
ID=12808801
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4863483A Granted JPS59176586A (ja) | 1983-03-25 | 1983-03-25 | 環状電気炉 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59176586A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9171746B2 (en) * | 2011-09-06 | 2015-10-27 | Arsalan Emami | Heater elements with enhanced cooling |
-
1983
- 1983-03-25 JP JP4863483A patent/JPS59176586A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59176586A (ja) | 1984-10-05 |
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