JPS59171055A - 磁気光学記憶素子 - Google Patents

磁気光学記憶素子

Info

Publication number
JPS59171055A
JPS59171055A JP4548883A JP4548883A JPS59171055A JP S59171055 A JPS59171055 A JP S59171055A JP 4548883 A JP4548883 A JP 4548883A JP 4548883 A JP4548883 A JP 4548883A JP S59171055 A JPS59171055 A JP S59171055A
Authority
JP
Japan
Prior art keywords
film
magneto
rare earth
oxidation
recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4548883A
Other languages
English (en)
Other versions
JPH0215929B2 (ja
Inventor
Akira Takahashi
明 高橋
Junji Hirokane
順司 広兼
Hiroyuki Katayama
博之 片山
Kenji Oota
賢司 太田
Hideyoshi Yamaoka
山岡　秀嘉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP4548883A priority Critical patent/JPS59171055A/ja
Priority to DE3382791T priority patent/DE3382791T2/de
Priority to DE8888104160T priority patent/DE3382672T2/de
Priority to EP92110340A priority patent/EP0509555B1/en
Priority to EP88104159A priority patent/EP0316508B1/en
Priority to DE8383302419T priority patent/DE3380539D1/de
Priority to EP83302419A priority patent/EP0111988B2/en
Priority to EP88104160A priority patent/EP0319636B1/en
Priority to EP88104161A priority patent/EP0314859B1/en
Priority to DE88104161T priority patent/DE3382702T2/de
Priority to DE8888104159T priority patent/DE3382671T2/de
Priority to CA000427088A priority patent/CA1209698A/en
Publication of JPS59171055A publication Critical patent/JPS59171055A/ja
Publication of JPH0215929B2 publication Critical patent/JPH0215929B2/ja
Priority to US08/443,760 priority patent/US5738765A/en
Priority to US08/450,219 priority patent/US5714251A/en
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C23C14/0652—Silicon nitride
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0617—AIII BV compounds, where A is Al, Ga, In or Tl and B is N, P, As, Sb or Bi
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
    • G11B11/10582—Record carriers characterised by the selection of the material or by the structure or form
    • G11B11/10584—Record carriers characterised by the selection of the material or by the structure or form characterised by the form, e.g. comprising mechanical protection elements
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B13/00—Recording simultaneously or selectively by methods covered by different main groups among G11B3/00, G11B5/00, G11B7/00 and G11B9/00; Record carriers therefor not otherwise provided for; Reproducing therefrom not otherwise provided for
    • G11B13/04—Recording simultaneously or selectively by methods covered by different main groups among G11B3/00, G11B5/00, G11B7/00 and G11B9/00; Record carriers therefor not otherwise provided for; Reproducing therefrom not otherwise provided for magnetically or by magnetisation and optically or by radiation, for changing or sensing optical properties
    • G11B13/045—Recording simultaneously or selectively by methods covered by different main groups among G11B3/00, G11B5/00, G11B7/00 and G11B9/00; Record carriers therefor not otherwise provided for; Reproducing therefrom not otherwise provided for magnetically or by magnetisation and optically or by radiation, for changing or sensing optical properties combined recording by magnetic and optic means
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/258—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24302—Metals or metalloids
    • G11B2007/24308—Metals or metalloids transition metal elements of group 11 (Cu, Ag, Au)
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24302—Metals or metalloids
    • G11B2007/24314—Metals or metalloids group 15 elements (e.g. Sb, Bi)
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24302—Metals or metalloids
    • G11B2007/24316—Metals or metalloids group 16 elements (i.e. chalcogenides, Se, Te)
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24318—Non-metallic elements
    • G11B2007/2432—Oxygen
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24318—Non-metallic elements
    • G11B2007/24328—Carbon
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B2007/25705—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G11B2007/25706—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing transition metal elements (Zn, Fe, Co, Ni, Pt)
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B2007/25705—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G11B2007/25708—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing group 13 elements (B, Al, Ga)
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B2007/25705—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G11B2007/25713—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing nitrogen
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/253—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates
    • G11B7/2531—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates comprising glass
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/253—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates
    • G11B7/2533—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates comprising resins
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/253—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates
    • G11B7/2533—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates comprising resins
    • G11B7/2534—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates comprising resins polycarbonates [PC]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【発明の詳細な説明】 く技術分野〉 末完＃Ｊはレーザ等の光により情報の記録・再生・消去
等を行々う磁気光学記憶素子に関する。
〈従来技術〉 近年、光メモリ素子は高密度・大容量のメモリである為
に将来性を期待され多方面で種々の研究開発が行なわれ
ている。中・でも使用者が追加記録をなし得る光メモリ
素子（消去は不可能）、及び使用者が追加記録と消去を
在し得る光メモリ素子については強い期待が寄せられ既
に種々の記録媒体や光メモリシステムが発表されている
。前者の光メモリ素子の記録媒体としてはＴｅＯｘ、Ｔ
ｅＳｅ。
ＴｅＣ等が知られ、後者の光メモリ素子の記録媒体とし
てはＧｄＴｂＦｅ、ＧｄＴｂＤｙＦｅ、ＴｂＦｅ等が知
らノＬでいる。しかしこれらの記録媒体の大半は耐食性
に欠ける為従来その対策として光メモリ素子構造に色々
な工夫がなされて来た。
次に記録媒体が腐食（酸化）された場合の光メモリ素子
の不都合な点について説明を行なう。本発明者は記録媒
体が希土類遷移金属合金を用いて形成される、使用者が
追加記録と消去とをなし得る光メモリ素子（所謂磁気光
学記憶素子）につｂで研究調査を行なった。第１図にそ
の磁気光学記憶素子の従来の具体的構造を示す。１はガ
ラス基板であり、その上に膜厚１００〜２００ＡのＧｄ
ＴｂＦｅ非晶質合金薄膜２（記録媒体）がスパッタリン
グによって形成され、その上に膜厚３００〜４００Ａの
ＳｉＯ２膜３（透明誘電体膜）がスパッタリングによっ
て形成され、その上に膜厚３００〜５００ＡのＣｕ膜４
（反射膜）がスパッタリングによって形成されている。
この構造の磁気光学記憶素子について第２図に示す光学
系で磁気光学回転角の磁場依存性を測定口だ。第２図に
おいて５は単色光を出力する光源（レーザ光源）であり
、該光源５から出力された光は偏光子６を通過すること
により直線偏光に変えられ、更にノ・−フミラー７を通
過して上述した磁気光学記憶素子８に面に垂直に入射さ
れる。上記素子８の記録媒体２への光の入射はガラス基
板〜１を通じて行なわれる。上記磁気光学記憶素子８か
らの反射光嬬：上記ノ・−フミラー７によって進路を変
えられた後で光検出器９（光の偏光面の回転角を検出）
に入射する。１０は磁場を変える電磁石である○ 以上の光学系を用いて磁気光学回転角の磁場依存性を測
定したところ第３図の結果が得られた。
同図において横軸は印加した磁場Ｈの強さて示し、縦軸
はカー回転角θにの角度を示している。同図のＩ（ｃは
保磁力（磁化を反転する磁力）の値であ必。この保磁力
の値は磁気光学記憶素子において極めて重要な要素であ
る。保磁力が大き過ぎれｒ丁情報の記録に過大な熱が必
要となり半導体し〜ザ等の小型レーザでは記録が困難な
場合がある。又情報の記録時に付与する磁場も過大なも
のが要求される。一方探磁力が小さ過ぎれば外部温度あ
るいは外部磁場の比較市価かな上昇によって記録情報が
誤捷って消滅する虞れがある。一般的に記録媒体の保磁
力の値が経時変化し７た場合、記録に必要な温度、磁場
の値は変化するので、理想的には保磁力の値が一定であ
ることが望ましい。
さて、上記磁気光学記憶素子の記録媒体の保磁力の値は
」＝記記録媒体が希土類と遷移金属の合金の場合上記希
土類の組成比によって大きく変化するものである。第４
図はＧｄＴｂＦｅ非晶質合金薄膜における希土類（Ｇｄ
、Ｔｂ）の組成比と保磁力の値との関係を示すグラフ図
である。同図の横軸はスパッタリングの際に鉄ターゲツ
ト上に置かれた希土類の面積比を示す。尚Ｇｄ、Ｔｂは
同量である。同図のグラフから室温が補償温度である９
　ｄ　Ｔ　ｂ　Ｆ　ｅ非晶質合金薄膜の希土類％は約２
６．３％であることがわかる。ここで磁気光学効果の変
化特性（第３図に示す如きカー回転角の変化特性）はＧ
　ｄ　Ｔ　ｂ　Ｆ　ｅ非晶質合金薄膜の希土類％の値が
上記２６．３％の点を境に逆転し、上記２６．３％より
希土類％が多い（希土類リンチ）場合右上がりの変化を
示し上記２６３％より希土類％が少ない（鉄リッチ）場
合左上がりり変化を示す。
本発明者は第４図のＡで示す組成の記録媒体を作成し、
その信頼性を調べる為に７０℃の状態で４２時間放置し
た。すると保磁力Ｈｃが３ＫＯｅのＢで示す組成の記録
媒体に変化（変化状態を矢印で示す）していた。これは
ＧｄＴｂＦｅ非晶質合金膜中の希土類（Ｇｄ、Ｔｂ）が
特にＧｄＴｂＦｅ非晶質合金膜に臨接する５１０２膜か
ら分離した酸素によって酸化され、その酸化されただけ
の量の希土類が磁気的特性に関与できなくな゛っだ為と
考えられる。
以上のように従来構造の磁気光学記憶素子においては酸
化による記録媒体の経時変化を防止するととができず、
一定した保磁力特性を得ることができない為情報の記録
を安定して行なえなかった。
これに対する対応策として本発明者は上記透明誘電体膜
を窒化アルミニウム、窒化ケイ素等の酸素を含有しない
窒化膜にて形成する構造とするものを発案した。即ち例
えばアルミニラｌ、ターゲ、ｙトを用いて穿索雰囲中で
反応性スパッタリングすることによって上記透明誘電体
膜を形成すればその膜形成時において記録媒体に酸素が
侵入する虞れがない為従来構造の磁気光学記憶素子に比
べて著しく信頼性が向上したのである。
しかしこの透明誘電体膜を窒化膜にて形成する素子構造
においても若干の問題があることが判明した。つまり透
明誘電体膜をＳ　］　０２膜で形成１〜だ場合に比べ窒
化膜で形成した場合はカー回転角が減少するものである
。実験では入射レーザ波長が３００’ｎｍの時に５ｉＯ
ｚ膜ではカー回転角が１．０であったものが窒化膜では
０．８に低下したのである。。
〈目的〉 本発明は以上の問題点に鑑みてなさ１１だもので、上記
透明誘電体膜を窒化膜で形成し〆こ場合の再生信号の品
質向上を促すことを目的とするものであるＯ 〈実施例〉 以下、本発明に係る磁気光学記憶素子の一実施例につい
て図面を用いて詳細に説明する。第５図は本発明に係る
磁気光学記憶素子の一実施例の構造を示す一部側面断面
図である。１１はガラス基板であり、そ（７）上に膜厚
１５０〜２０　ＯＡ　ノＧｄＴｂＦｅ非晶質合金薄膜］
２（記録媒体）がスパッタリングによって形成され、そ
の上に膜厚４．００〜５００ＡのＡｔＮ（窒化アルミニ
ウム）膜１３（透明誘電体膜）が窒素雰囲気中でのアル
ミニウムの反応性スパッタリングによって形成され、そ
の上に膜厚５００〜６００ＡのＴｉ（チタン）膜若しく
はＴｉＮ（窒化チタン）膜１４（反射膜）がスパッタリ
ングによって形成される。
上記の如く反射膜をチタン若しくは窒化チタンで形成し
プヒ場合は次の利点がある。即ち上述した透明誘電体膜
を窒化アルミニウムで形成した場合その上にＣｕ’？？
Ａ１等の従来反射膜をレーザ波長域（８００ｎｍ）での
反射率が高い状態で被着することは非常に困難、であっ
た。こ第１−は窒化アルミニウム・内の窒素成分のＣｕ
やＡｔに対する影響が無視できない為と考えられる。と
ハに対しチタン若しく（・マ窒化チタンによる反射膜は
窒化アルミニウムの透明誘電体膜にレーザ波長域での反
射率が高い状態で被着することが容易にできるのである
。
そしてこの事により反射光量を多くでき再生信号の向上
を得ることができるのである。又、チタン若しくは窒化
チタンによる反射膜をスパッタリングによって形成する
場合Ｔｉがターゲソ！・となるがＴｉは比較的安価であ
って入手が容易であることも一つの利点である。
とこで本発明に係る磁気光学記憶素子の構成は上記実施
例の構造に限定されるものではない。即ち窒化アルミニ
ウムからなる透明誘電体膜をガラス基板１１とＧ　ｄ　
Ｔ　ｂ　Ｆ　ｅ非晶質合金薄膜１２０間にも設けること
によってＧｄＴｂＦｅ非晶質合金薄膜を窒化アルミニウ
ムからなる透明誘電体膜にて挾持する構造でもよく、上
記ガラス基板の代わりにポリカルボネート、アクリル等
の樹脂基板を用いた構造でもよい。
く効果〉 本発明によれば記録媒体の酸化を著しく防止することが
でき、又その構造の素子において再生信号の状態を品質
上問題ない程度に確保し得るものである。
【図面の簡単な説明】
・第１図は従来の磁気光学記憶素子の構造の一部側面断
面図、第２図は測定光学系の構成説明図、第３図は磁気
光学回転角の磁場依存性を示すグラフ図、第４図はＧｄ
ＴｂＦｅ非晶質合金薄膜の希土類の組成比と保磁力の値
との関係を示すグラフ図、第５図は本発明に係る磁気光
学記憶素子の一実施例の構成の一部側面断面図を示す。 図中、■　ガラス基板　２　：　ＧｄＴｂＦｅ非晶質、
３　：　Ｓ　ｉ０２膜　　　　合金薄膜５光源　４Ｃｕ
膜 ７、ハーフミラ−６，偏光子 ９、光検出器　　８　磁気光学記憶素子１１　カラス基
板１０：電磁石 １３　：　ＡｔＮ膜　１２　：　ＧｄＴｂＦｅ非晶質合
金薄膜 １４：Ｔｉ膜若しくは ＴｉＮ膜ン 代理人　弁理士　福　士　愛　彦（他２名）４’　　　
　　　　　　　ｙＡ／図 ８ 第　２　図

Claims (1)

    【特許請求の範囲】
  1. １　基板上に希土類遷移金属合金薄刃免と、酸素を含有
    し２ない窒化アルミニウム、ｇ化ケイ素等の窒化膜から
    なる透明誘電体膜と、チタン若しくは窒化チタンからな
    る反射膜とをこの順にて積層したことを特徴とする磁気
    光学記憶素子。
JP4548883A 1982-12-15 1983-03-17 磁気光学記憶素子 Granted JPS59171055A (ja)

Priority Applications (14)

Application Number Priority Date Filing Date Title
JP4548883A JPS59171055A (ja) 1983-03-17 1983-03-17 磁気光学記憶素子
DE3382791T DE3382791T2 (de) 1982-12-15 1983-04-20 Magneto-optischer Speicher.
EP88104160A EP0319636B1 (en) 1982-12-15 1983-04-28 Magneto-optic memory device
DE88104161T DE3382702T2 (de) 1982-12-15 1983-04-28 Magneto-optischer Speicher.
EP88104159A EP0316508B1 (en) 1982-12-15 1983-04-28 Magneto-optic memory device
DE8383302419T DE3380539D1 (en) 1982-12-15 1983-04-28 Magneto-optic memory device
EP83302419A EP0111988B2 (en) 1982-12-15 1983-04-28 Magneto-optic memory device
DE8888104160T DE3382672T2 (de) 1982-12-15 1983-04-28 Magneto-optischer speicher.
EP88104161A EP0314859B1 (en) 1982-12-15 1983-04-28 Magneto-optic memory device
EP92110340A EP0509555B1 (en) 1982-12-15 1983-04-28 A method of making a magneto-optic memory device
DE8888104159T DE3382671T2 (de) 1982-12-15 1983-04-28 Magneto-optischer speicher.
CA000427088A CA1209698A (en) 1982-12-15 1983-04-29 Magneto-optic memory device
US08/443,760 US5738765A (en) 1982-12-15 1995-05-18 Magneto-optic memory device
US08/450,219 US5714251A (en) 1982-12-15 1995-05-25 Magneto-optic memory device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4548883A JPS59171055A (ja) 1983-03-17 1983-03-17 磁気光学記憶素子

Publications (2)

Publication Number Publication Date
JPS59171055A true JPS59171055A (ja) 1984-09-27
JPH0215929B2 JPH0215929B2 (ja) 1990-04-13

Family

ID=12720784

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4548883A Granted JPS59171055A (ja) 1982-12-15 1983-03-17 磁気光学記憶素子

Country Status (1)

Country Link
JP (1) JPS59171055A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0323532A (ja) * 1989-06-20 1991-01-31 Nec Home Electron Ltd 光ディスク及びその製造方法
US5232790A (en) * 1990-04-28 1993-08-03 Kyocera Corporation Magneto-optical recording disc and method of producing it
EP0619576A2 (en) * 1993-04-05 1994-10-12 Canon Kabushiki Kaisha Optical recording medium and process for manufacturing it
JPH07272336A (ja) * 1995-03-17 1995-10-20 Sharp Corp 光メモリ素子

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0323532A (ja) * 1989-06-20 1991-01-31 Nec Home Electron Ltd 光ディスク及びその製造方法
US5232790A (en) * 1990-04-28 1993-08-03 Kyocera Corporation Magneto-optical recording disc and method of producing it
EP0619576A2 (en) * 1993-04-05 1994-10-12 Canon Kabushiki Kaisha Optical recording medium and process for manufacturing it
EP0619576A3 (en) * 1993-04-05 1995-04-05 Canon Kk Optical record carrier and manufacturing process.
JPH07272336A (ja) * 1995-03-17 1995-10-20 Sharp Corp 光メモリ素子

Also Published As

Publication number Publication date
JPH0215929B2 (ja) 1990-04-13

Similar Documents

Publication Publication Date Title
US4556291A (en) Magneto-optic storage media
JPH0514407B2 (ja)
US5030512A (en) Magneto-optical recording medium
JPS59171055A (ja) 磁気光学記憶素子
EP0349271B1 (en) Magneto-optic memory device
US5858565A (en) Magneto-optic compositionally modulated structure
JPH0519213B2 (ja)
EP0391738B1 (en) Magneto-optic memory medium
JPH0782672B2 (ja) 磁性薄膜記録媒体
JPS59171054A (ja) 磁気光学記憶素子
JPH0350344B2 (ja)
JPS6126954A (ja) 光磁気記録媒体
JPS61196444A (ja) 光磁気デイスク
JPH0350343B2 (ja)
JP2503268B2 (ja) 光磁気記録媒体及びその製造方法
JPS63311642A (ja) 光メモリ素子
JP2948420B2 (ja) 光磁気記録媒体
JP2624128B2 (ja) 光磁気記録媒体
KR930002168B1 (ko) 자기광 메모리 매체
JPH0660452A (ja) 光磁気記録媒体
JPH0462140B2 (ja)
JPS63269348A (ja) 光磁気記録用媒体
JPS6189604A (ja) 金属酸化物磁性体および磁性膜
JPH056584A (ja) 光磁気記録媒体
JPH05290417A (ja) 光磁気記録媒体