JPS59168678A - 反射防止膜形成用組成物 - Google Patents

反射防止膜形成用組成物

Info

Publication number
JPS59168678A
JPS59168678A JP58042101A JP4210183A JPS59168678A JP S59168678 A JPS59168678 A JP S59168678A JP 58042101 A JP58042101 A JP 58042101A JP 4210183 A JP4210183 A JP 4210183A JP S59168678 A JPS59168678 A JP S59168678A
Authority
JP
Japan
Prior art keywords
composition
metal
forming
antireflection film
nitrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58042101A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6362117B2 (enrdf_load_stackoverflow
Inventor
Masaaki Okunaka
正昭 奥中
Mitsuo Nakatani
中谷　光雄
Haruhiko Matsuyama
松山　治彦
Ataru Yokono
中 横野
Tokio Isogai
磯貝　時男
Tadashi Saito
忠 斉藤
Kunihiro Matsukuma
邦浩 松熊
Sumiyuki Midorikawa
緑川　澄之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58042101A priority Critical patent/JPS59168678A/ja
Publication of JPS59168678A publication Critical patent/JPS59168678A/ja
Publication of JPS6362117B2 publication Critical patent/JPS6362117B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/30—Coatings
    • H10F77/306—Coatings for devices having potential barriers
    • H10F77/311—Coatings for devices having potential barriers for photovoltaic cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Photovoltaic Devices (AREA)
  • Light Receiving Elements (AREA)
JP58042101A 1983-03-16 1983-03-16 反射防止膜形成用組成物 Granted JPS59168678A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58042101A JPS59168678A (ja) 1983-03-16 1983-03-16 反射防止膜形成用組成物

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58042101A JPS59168678A (ja) 1983-03-16 1983-03-16 反射防止膜形成用組成物

Publications (2)

Publication Number Publication Date
JPS59168678A true JPS59168678A (ja) 1984-09-22
JPS6362117B2 JPS6362117B2 (enrdf_load_stackoverflow) 1988-12-01

Family

ID=12626589

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58042101A Granted JPS59168678A (ja) 1983-03-16 1983-03-16 反射防止膜形成用組成物

Country Status (1)

Country Link
JP (1) JPS59168678A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6324677A (ja) * 1986-07-17 1988-02-02 Fuji Electric Co Ltd 太陽電池
WO2003017375A1 (es) * 2001-08-09 2003-02-27 Juan Jose Damian Alvarez Celula solar perfeccionada
JP2004507551A (ja) * 2000-08-28 2004-03-11 アドバンスト　テクノロジー　マテリアルズ，インコーポレイテッド ソース材料組成物および化学的蒸着法による基板上への金属膜形成方法
US7838073B2 (en) 2003-10-14 2010-11-23 Advanced Technology Materials, Inc. Tantalum amide complexes for depositing tantalum-containing films, and method of making same

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6324677A (ja) * 1986-07-17 1988-02-02 Fuji Electric Co Ltd 太陽電池
JP2004507551A (ja) * 2000-08-28 2004-03-11 アドバンスト　テクノロジー　マテリアルズ，インコーポレイテッド ソース材料組成物および化学的蒸着法による基板上への金属膜形成方法
WO2003017375A1 (es) * 2001-08-09 2003-02-27 Juan Jose Damian Alvarez Celula solar perfeccionada
ES2183741A1 (es) * 2001-08-09 2003-03-16 Alvarez Juan Jose Damian Celula solar perfeccionada.
US6940009B2 (en) * 2001-08-09 2005-09-06 Juan Jose Damian Alvarez Solar cell
US7838073B2 (en) 2003-10-14 2010-11-23 Advanced Technology Materials, Inc. Tantalum amide complexes for depositing tantalum-containing films, and method of making same

Also Published As

Publication number Publication date
JPS6362117B2 (enrdf_load_stackoverflow) 1988-12-01

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