CN105679402B - 含无铅玻璃料的导电浆 - Google Patents
含无铅玻璃料的导电浆 Download PDFInfo
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- CN105679402B CN105679402B CN201510831070.6A CN201510831070A CN105679402B CN 105679402 B CN105679402 B CN 105679402B CN 201510831070 A CN201510831070 A CN 201510831070A CN 105679402 B CN105679402 B CN 105679402B
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- conductive paste
- oxide
- weight
- lead
- less glasses
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- 239000011521 glass Substances 0.000 title claims abstract description 41
- 229910052751 metal Inorganic materials 0.000 claims abstract description 25
- 239000002184 metal Substances 0.000 claims abstract description 23
- 229910001930 tungsten oxide Inorganic materials 0.000 claims abstract description 11
- 239000000463 material Substances 0.000 claims description 44
- 239000004065 semiconductor Substances 0.000 claims description 26
- 239000000203 mixture Substances 0.000 claims description 15
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 14
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc oxide Inorganic materials [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 13
- 239000007787 solid Substances 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 12
- JPJALAQPGMAKDF-UHFFFAOYSA-N selenium dioxide Chemical compound O=[Se]=O JPJALAQPGMAKDF-UHFFFAOYSA-N 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 10
- 239000002904 solvent Substances 0.000 claims description 9
- 239000011575 calcium Substances 0.000 claims description 8
- QXYJCZRRLLQGCR-UHFFFAOYSA-N dioxomolybdenum Chemical compound O=[Mo]=O QXYJCZRRLLQGCR-UHFFFAOYSA-N 0.000 claims description 8
- GNTDGMZSJNCJKK-UHFFFAOYSA-N divanadium pentaoxide Chemical compound O=[V](=O)O[V](=O)=O GNTDGMZSJNCJKK-UHFFFAOYSA-N 0.000 claims description 8
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium dioxide Chemical compound O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 claims description 8
- 239000011777 magnesium Substances 0.000 claims description 8
- 239000011572 manganese Substances 0.000 claims description 8
- NUJOXMJBOLGQSY-UHFFFAOYSA-N manganese dioxide Chemical compound O=[Mn]=O NUJOXMJBOLGQSY-UHFFFAOYSA-N 0.000 claims description 8
- 239000010955 niobium Substances 0.000 claims description 8
- 229920000642 polymer Polymers 0.000 claims description 8
- 239000011734 sodium Substances 0.000 claims description 8
- 239000010936 titanium Substances 0.000 claims description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 6
- 239000004411 aluminium Substances 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 239000004332 silver Substances 0.000 claims description 6
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- KKCBUQHMOMHUOY-UHFFFAOYSA-N sodium oxide Chemical compound [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 claims description 6
- 229910052691 Erbium Inorganic materials 0.000 claims description 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 5
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 5
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- TYIXMATWDRGMPF-UHFFFAOYSA-N dibismuth;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Bi+3].[Bi+3] TYIXMATWDRGMPF-UHFFFAOYSA-N 0.000 claims description 5
- UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 claims description 5
- 229910052738 indium Inorganic materials 0.000 claims description 5
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 5
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 5
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 claims description 5
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- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 claims description 5
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims description 4
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- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 4
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 4
- FUJCRWPEOMXPAD-UHFFFAOYSA-N Li2O Inorganic materials [Li+].[Li+].[O-2] FUJCRWPEOMXPAD-UHFFFAOYSA-N 0.000 claims description 4
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 claims description 4
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 4
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 4
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 claims description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 4
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims description 4
- 229910052772 Samarium Inorganic materials 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 4
- 229910052787 antimony Inorganic materials 0.000 claims description 4
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims description 4
- 229910052788 barium Inorganic materials 0.000 claims description 4
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052791 calcium Inorganic materials 0.000 claims description 4
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 claims description 4
- XUCJHNOBJLKZNU-UHFFFAOYSA-M dilithium;hydroxide Chemical compound [Li+].[Li+].[OH-] XUCJHNOBJLKZNU-UHFFFAOYSA-M 0.000 claims description 4
- 239000002270 dispersing agent Substances 0.000 claims description 4
- -1 gallic oxide (Ga2O3) Chemical compound 0.000 claims description 4
- 229910052733 gallium Inorganic materials 0.000 claims description 4
- 229910052732 germanium Inorganic materials 0.000 claims description 4
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 4
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 claims description 4
- 229910052746 lanthanum Inorganic materials 0.000 claims description 4
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims description 4
- 229910052744 lithium Inorganic materials 0.000 claims description 4
- 229910052749 magnesium Inorganic materials 0.000 claims description 4
- 229910052748 manganese Inorganic materials 0.000 claims description 4
- 229910000480 nickel oxide Inorganic materials 0.000 claims description 4
- 229910052758 niobium Inorganic materials 0.000 claims description 4
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 4
- 238000007254 oxidation reaction Methods 0.000 claims description 4
- 229910052698 phosphorus Inorganic materials 0.000 claims description 4
- 239000011574 phosphorus Substances 0.000 claims description 4
- 229910052700 potassium Inorganic materials 0.000 claims description 4
- 239000011591 potassium Substances 0.000 claims description 4
- KZUNJOHGWZRPMI-UHFFFAOYSA-N samarium atom Chemical compound [Sm] KZUNJOHGWZRPMI-UHFFFAOYSA-N 0.000 claims description 4
- FKTOIHSPIPYAPE-UHFFFAOYSA-N samarium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[Sm+3].[Sm+3] FKTOIHSPIPYAPE-UHFFFAOYSA-N 0.000 claims description 4
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 claims description 4
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- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 claims description 4
- DLYUQMMRRRQYAE-UHFFFAOYSA-N tetraphosphorus decaoxide Chemical compound O1P(O2)(=O)OP3(=O)OP1(=O)OP2(=O)O3 DLYUQMMRRRQYAE-UHFFFAOYSA-N 0.000 claims description 4
- 239000013008 thixotropic agent Substances 0.000 claims description 4
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- FZFYOUJTOSBFPQ-UHFFFAOYSA-M dipotassium;hydroxide Chemical compound [OH-].[K+].[K+] FZFYOUJTOSBFPQ-UHFFFAOYSA-M 0.000 claims description 2
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Abstract
本申请公开了一种导电浆,其特征在于,包含导电金属或其衍生物,以及分散在有机载体中的无铅玻璃料,所述无铅玻璃料包含碲‑铋‑锌‑钨‑氧化物。本申请的导电浆可用于形成太阳能电池电极,并且具有优异的能源转换效率。
Description
技术领域
本申请属于导电浆领域,具体地说,涉及一种包含导电金属、无铅玻璃料和有机载体的导电浆,以及一种应用所述导电浆的制品。
背景技术
现有的太阳能电池或光电池包含半导体基底、扩散层、抗反射涂层、背面电极以及正面电极,其中,使用抗反射涂层是为了促进光的吸收,进而提高光电效率。抗反射涂层通常包含硅(例如:一氮化硅或二氧化硅)。然而,抗反射涂层使得从半导体基底至正面电极间的电阻增加,产生减弱激发态电子流动的绝缘作用。
因此,在形成正面电极时,通常使用混合包含导电金属或其衍生物(例如:银粒子)、玻璃(例如:包含氧化铅)、有机载体等而制成的导电浆,因为玻璃具有低熔点、低熔融黏度及防止非控制性失透的稳定性。藉由网版印刷、刻板印刷等方式,在半导体基底上将导电浆印刷为栅线或其他图案,之后进行烧渗(fire-through),导电浆于烧结期间穿透该抗反射涂层,使半导体基底与栅线或其他图案间,透过金属触点而电性接触,进而形成正面电极。
为了达成合适的烧渗,较佳地使用对于抗反射涂层具有良好溶解度的玻璃,作为导电浆中的玻璃料。已知用于形成正面电极的导电浆中,玻璃料经常含有氧化铅的玻璃,因为易于调整玻璃的软化点,可提供良好的基底黏着性,可轻易地烧渗的可焊性及制备性能优异的太阳能电池等特性。
近年来大幅提升的环境意识,汽车、电子和太阳能电池等工业上,希望使用对环境友好的无铅材料。但在烧结后,具备穿透该抗反射涂层并与该半导体基底形成良好黏着的能力,以及具备优异的太阳能电池转换效率,又取决于该导电浆的组成,以及经烧渗的所述导电浆与所述半导体基底间电性接触的品质。
因此,提供一种可于低温烧结的含无铅玻璃料的导电浆,其具备前述的已知含铅材料的特性,实为业界所期盼。
发明内容
有鉴于此,本申请所要解决的技术问题是含无铅玻璃料的导电浆,在烧结后与基底黏着性不足,以及能源转换效率不佳的问题
为了解决上述技术问题,本申请一方面提供一种导电浆,包含:(a)导电金属或其衍生物,占固体重量的约85至约99.5重量%;(b)包含碲-铋-锌-钨-氧化物的无铅玻璃料,占固体重量约0.5至约15重量%;以及(c)有机载体;所述的固体重量系指(a)导电金属及(b)无铅玻璃料的总重量。
在本申请的较佳实施例中,导电金属或其衍生物包含银粉。
在本申请的较佳实施例为无铅玻璃料中,氧化碲、氧化铋、氧化锌及氧化钨的比例分别为约55至约90重量%、约0.1至约15重量%、约0.1至约15重量%及约0.1至约15重量%。
本申请的较佳实施例为所述有机载体是包含聚合物与溶剂的溶液。
在本申请的进一步较佳实施例中,所述无铅玻璃料包含一种或多种下列组成的群组的元素或其氧化物:磷(P)、钡(Ba)、钠(Na)、镁(Mg)、钙(Ca)、锶(Sr)、铝(Al)、锂(Li)、钾(K)、锆(Zr)、钒(V)、硒(Se)、铁(Fe)、铟(In)、锰(Mn)、锡(Sn)、镍(Ni)、锑(Sb)、银(Ag)、硅(Si)、铒(Er)、锗(Ge)、钛(Ti)、镓(Ga)、铈(Ce)、铌(Nb)、钐(Sm)及镧(La)等,其比例为所述无铅玻璃料的约0.1至约10重量%。本申请的另一进一步较佳实施例为所述有机载体包含一种或多种功能性添加剂,例如:黏度调整剂、分散剂、触变剂、湿润剂等添加剂。
本申请另一方面提供一种制品,包含一半导体基底,以及设置在该半导体基底上如上述的导电浆。在本申请的一较佳实施例中,所述制品为半导体装置。在本申请的另一较佳实施例中,所述半导体装置为太阳能电池。
上述内容已广泛地概述本申请的技术特征及其技术效果。本申请所属领域技术中具有通常知识者应理解,所公开的具体实施方式可轻易地被组合、修饰、置换及/或转用于本申请的技术思想范围内的其他物品、方法或用途,此均等范围并不违反权利要求书中所请求的保护范围。
为了充分了解本申请,于下文对本申请的例示性实施方式为详细说明,其并非用以限定本申请。本申请亦可为其他形式的实施方式进行实施。
本申请的含无铅玻璃块的导电浆可应用于各种产业,较佳可应用于半导体制造业,更佳可应用于太阳能电池制造业。所述导电浆包含:(a)导电金属或其衍生物,(b)包含碲-铋-锌-钨-氧化物的无铅玻璃料,以及(c)有机载体。其中,(a)导电金属及(b)无铅玻璃料等无机成分是均匀分散在(c)有机载体中。
于本申请中,有机载体不属于固体成分的一部分,因此,固体重量是指(a)导电金属及(b)无铅玻璃料等固体成分的总重量。
本申请的导电金属并未特别地限制,只要对本申请的技术效果没有负面影响即可。所述导电金属可为单一元素,选自于银、铝及铜;亦可为合金或混合的金属,例如:金、铂、钯及镍等。然而由导电度的观点,使用纯银为较佳者。
当所述导电金属为银时,可为银金属、银衍生物及/或其混合物的形式。例示性的银衍生物包含氧化银(Ag2O)、银盐(例如:氯化银(AgCl)、硝酸银(AgNO3)、醋酸银(AgOOCCH3)、三氟醋酸银(AgOOCF3)或磷酸银(Ag3PO4))、表面上涂布银层的涂银复合物或以银为主成分的银合金等。
所述导电金属可为粉末形式(例如:球形、片形、不定形及/或其混合)或胶态悬浮液形式等已知者。所述导电金属的平均粒度并未特别地限制,较佳为0.1至10微米,亦可使用平均粒度、粒度分布或形状等不同的导电金属混合物。
在本申请的一较佳实施例中,所述导电金属或其衍生物占该导电浆的固体成分的约85至约99.5重量%。
本申请的无铅玻璃料是完全不含铅的成分,具体而言,不含任何铅及其衍生物(例如:一氧化铅(PbO)、二氧化铅(PbO2)或四氧化三铅(Pb3O4)等铅氧化物)。在本申请的一具体实施例中,所述无铅玻璃料是以氧化碲、氧化铋、氧化锌及氧化钨为主要成分。在本申请的一较佳实施例中,氧化碲、氧化铋、氧化锌及氧化钨的比例分别为约55至约90重量%、约0.1至约15重量%、约0.1至约15重量%及约0.1至约15重量%,此是以四者的总重量为基础。
在本申请的进一步较佳实施例中,氧化碲、氧化铋、氧化锌及氧化钨的混合物包含一种或多种金属氧化物,例如:氧化锆(ZrO2)、五氧化二钒(V2O5)、氧化银(Ag2O)、三氧化二铒(Er2O3)、氧化锡(SnO)、氧化镁(MgO)、三氧化二铷(Nd2O3)、三氧化二铝(Al2O3)、二氧化硒(SeO2)、二氧化钛(TiO2)、氧化钠(Na2O)、氧化钾(K2O)、五氧化二磷(P2O5)、二氧化钼(MoO2)、二氧化锰(MnO2)、氧化镍(NiO)、氧化锂(Li2O)、三氧化二钐(Sm2O3)、二氧化锗(GeO2)、三氧化二铟(In2O3)、三氧化二镓(Ga2O3)、二氧化硅(SiO2)及三氧化二铁(Fe2O3)等。因此,本申请所述「碲-铋-锌-钨-氧化物」亦可包含有一种或多种金属元素或其氧化物,例如:磷(P)、钡(Ba)、钠(Na)、镁(Mg)、钙(Ca)、锶(Sr)、铝(Al)、锂(Li)、钾(K)、锆(Zr)、钒(V)、硒(Se)、铁(Fe)、铟(In)、锰(Mn)、锡(Sn)、镍(Ni)、锑(Sb)、银(Ag)、硅(Si)、铒(Er)、锗(Ge)、钛(Ti)、镓(Ga)、铈(Ce)、铌(Nb)、钐(Sm)及镧(La)等,其比例为该无铅玻璃料的约0.1至约10重量%。
本申请的(a)导电金属及(b)无铅玻璃料等固体的无机成分与(c)液体的有机载体混合而形成导电浆。适合的有机载体,可使该等无机成分均匀分散于其中,并具有适当的黏度而使该等无机成分可藉由网版印刷、刻板印刷等方式传递至抗反射涂层的表面上。所述导电浆且须具有良好的干燥速率及优异的烧渗性质。
所述有机载体是指一种溶剂,其并未特别地限制,可适当地选择自已知用于导电浆的溶剂。例示性的溶剂包含醇类(例如:异丙醇)、醇酯(例如:丙酸酯、邻苯二甲酸二丁酯)及醇醚(例如:二乙二醇丁醚)等或其混合物;较佳地,所述溶剂是沸点约120℃至约300℃的醇醚;最佳地,所述溶剂是二乙二醇丁醚(butyl carbitol)。所述有机载体可进一步包含挥发性液体,以促进导电浆施用到半导体基底上之后的快速硬化。
在本申请的一较佳实施例中,所述有机载体是包含聚合物与溶剂的溶液。因为由溶剂和溶解的聚合物组成的有机载体分散导电金属及无铅玻璃料等无机成分,容易制备具有适当黏度的导电浆;于印刷至抗反射涂层的表面并经干燥后,聚合物也提高了导电浆的黏着度及原始强度。
例示性的聚合物包含纤维素(例如:乙基纤维素(ethyl cellulose)、硝化纤维素、乙基羟乙基纤维素、羧甲基纤维素、羟丙基纤维素或其他纤维素衍生物)、低级醇的聚(甲基)丙烯酸树脂、酚树脂(例如:苯酚树脂)、醇酸树脂(例如:乙二醇单乙酸酯)等或其混合物;较佳地,所述聚合物是纤维素;最佳地,所述聚合物是乙基纤维素。
在本申请的较佳实施例中,有机载体包含溶于二乙二醇丁醚的乙基纤维素。
在本申请的另一进一步较佳实施例中,所述有机载体包含一种或多种功能性添加剂。例示性的功能性添加剂包含黏度调整剂、分散剂、触变剂、湿润剂及/或视需要的其他添加剂(例如:着色剂、防腐剂或氧化剂)等已知者,只要对本申请的技术效果没有负面影响即可。
在本申请的导电浆中,(a)导电金属及(b)无铅玻璃料等无机成分与(c)有机载体的比值,是由印刷该导电浆至抗反射涂层的需求而决定所述导电浆所需的黏度。通常所述导电浆包含约70至约95重量%的无机成分及约5至约30重量%的有机载体。
本申请的导电浆先进行印刷步骤(例如:网版印刷、刻板印刷等已知方式),在抗反射涂层上将所述导电浆印刷为栅线或其他图案。之后于含氧气的环境(例如:空气)中进行烧渗步骤(加热至约850至约950℃的温度,加热时间约0.05至约5分钟),以去除有机载体并烧结导电金属,使得该导电浆没有任何有机物质,并使得该导电浆于烧结期间穿透该抗反射涂层,接触到下方的半导体基底及一个或多个抗反射涂层。此烧渗步骤使得所述半导体基底与所述栅线或其他图案间,透过金属触点而电性接触,进而形成正面电极。
本申请另一方面涉及一种制品,较佳地,可用于制备半导体装置,更佳地,可用于制备太阳能电池。在本申请的实施例中,提供半导体基底(所述半导体基底包含半导体晶片、玻璃基底或适合形成太阳能电池的其他基底),于所述半导体基底上设置本申请的含无铅玻璃料的导电浆及一个或多个抗反射涂层(所述抗反射涂层可由已知方法涂布于所述半导体基底上,例如化学气相沉积、电浆增强气相沉积等),并经包含上述烧渗步骤的已知半导体制程,即可制得所述制品。
在本申请的较佳实施例中,所述半导体基底包含不定形的、多晶的或单晶的硅。在本申请的另一较佳实施例中,所述抗反射涂层包含二氧化硅、二氧化钛、氮化硅或其他已知的涂层。
与现有技术相比,本申请的主要技术效果是提供对环境友好、可于低温烧结、却仍具备已知含铅玻璃料特性等优异功效的含无铅玻璃料的导电浆,以及包含所述导电浆的制品,其不含铅,但能够于烧渗后具备良好的基底黏着性及优异的转换效率,以达成提供环保导电浆材料目的。
以下透过实施例对本申请进行更详细地说明,并无任何限制本申请的目的。
附图说明
无
具体实施方式
制备含无铅玻璃料的导电浆
导电浆的有机载体制备系先将5至25克重的乙基纤维素溶解于5至75克重的二乙二醇丁醚中,并添加少量黏度调整剂、分散剂、触变剂、湿润剂而得。再将80至99.5克重的工业级银粉原料、0.1至10克重的无铅玻璃料(表1,实施例G1至G15)及10至30克重的有机载体,于三辊研磨机(three-roll mill)混合分散均匀,以制得一糊状或膏状的导电浆。
另以相同方式制备含铅玻璃料(表2,比较例PG1至PG5)。
表1 无铅玻璃料(TeO2-Bi2O3-ZnO-WO3)的成分及其重量百分比(实施例)
wt% | G1 | G2 | G3 | G4 | G5 | G6 | G7 | G8 | G9 | G10 | G11 | G12 | G13 | G14 | G15 |
TeO2 | 58.5 | 65 | 62.5 | 71 | 75 | 69 | 75.5 | 79.5 | 85 | 88.5 | 81 | 77.5 | 57.5 | 83.5 | 76.5 |
Bi2O3 | 12 | 10 | 8 | 13 | 5 | 14 | 10 | 9.5 | 5 | 4.5 | 5 | 10 | 13.5 | 8 | 5 |
ZnO | 10 | 11 | 14 | 5 | 13 | 7 | 6 | 5.5 | 5 | 4 | 4 | 6 | 10 | 5 | 5 |
WO3 | 9.5 | 7 | 14 | 3 | 3 | 7 | 6 | 5.0 | 5 | 3 | 10 | 2 | 9 | 0.5 | 3 |
CaO | 1 | 1 | 0.5 | ||||||||||||
SiO2 | 0.5 | 1 | 2 | ||||||||||||
Na2O | 0.5 | 2 | 1 | 1 | 3 | ||||||||||
Li2O | 5 | 3 | 3 | 0.5 | 1 | 2 | 1 | 2.5 | 10 | ||||||
Al2O3 | 1.5 | 0.5 | 2 | 1 | 0.5 | ||||||||||
MgO | 1 | 0.5 | 3 | 0.5 | |||||||||||
SeO2 | 2 | 0.5 | 0.5 | 0.5 | |||||||||||
P2O5 | 0.5 | 1 | 0.5 | 2 | 0.5 | ||||||||||
Fe2O3 | 0.5 | 0.5 | 1 | 2 | |||||||||||
total(g) | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 100 |
表2 含铅玻璃料(PbO)的成分及其重量百分比(比较例)
wt% | PG1 | PG2 | PG3 | PG4 | PG5 |
SiO2 | 8 | 0.5 | |||
PbO | 20 | 35 | 35 | 20 | 10 |
TeO2 | 56.5 | 60 | 60 | 70 | 89.5 |
ZnO | 3 | 3 | 5 | 3 | |
Bi2O3 | 10 | 1 | 4 | ||
Na2O | 0.5 | 3 | |||
Li2O | 1 | 0.5 | 0.5 | ||
Fe2O3 | 0.5 | ||||
WO3 | 0.5 | ||||
total(g) | 100 | 100 | 100 | 100 | 100 |
制备太阳能电池的正面电极
使用网版印刷将含无铅玻璃的导电浆(实施例G1至G15)涂布于太阳能电池基底的正面,该太阳能电池基底的表面已预先经抗反射涂层(一氮化硅)处理,而该太阳能电池基底的背面电极已预先经铝胶(GSMC公司,型号A136)处理。网版印刷后的干燥温度为约100至约250℃、干燥时间为约5至约30分钟(视有机载体的种类及印刷重量的不同而有差异),网版印刷步骤即完成。
使用红外线传送带式烧结炉对干燥后的含无铅玻璃导电浆进行烧渗步骤,烧结温度为约850至约950℃,烧渗后的太阳能电池基底的正面及背面皆具备固态电极。
另以相同方式制备含铅玻璃料(比较例PG1至PG5)为正面电极的太阳能电池。
太阳能电池的性能测试
将已制得太阳能电池置于一太阳能测试机台(Berger公司,Pulsed Solar LoadPSL-SCD),于AM1.5G的太阳状态下测量该太阳能电池的开路电压(Uoc,单位V)、短路电流(Isc,单位A)、串联电阻(Rs,单位Ω)、填充因子(FF,单位%)及转换效率(Ncell,单位%)等电气特性,详见于表3及表4。
表3 涂布含无铅玻璃料的导电浆的太阳能电池(实施例)
Glasses | Uoc | Isc | Rs | FF | Ncell(%) |
G1 | 0.6283 | 8.588 | 0.00310 | 78.0 | 17.68 |
G2 | 0.6278 | 8.603 | 0.00288 | 78.3 | 17.78 |
G3 | 0.6284 | 8.581 | 0.00302 | 78.0 | 17.66 |
G4 | 0.6281 | 8.598 | 0.00321 | 77.9 | 17.67 |
G5 | 0.6283 | 8.614 | 0.00294 | 78.2 | 17.79 |
G6 | 0.6279 | 8.621 | 0.00306 | 77.8 | 17.70 |
G7 | 0.6278 | 8.618 | 0.00324 | 77.9 | 17.70 |
G8 | 0.6231 | 8.725 | 0.00320 | 77.7 | 17.37 |
G9 | 0.6236 | 8.707 | 0.00297 | 77.9 | 17.39 |
G10 | 0.6282 | 8.609 | 0.02980 | 78.0 | 17.73 |
G11 | 0.6287 | 8.595 | 0.00308 | 78.0 | 17.72 |
G12 | 0.6280 | 8.608 | 0.00301 | 77.8 | 17.67 |
G13 | 0.6292 | 8.617 | 0.00300 | 78.1 | 17.80 |
G14 | 0.6281 | 8.613 | 0.00289 | 78.1 | 17.76 |
G15 | 0.6270 | 8.629 | 0.00309 | 77.8 | 17.70 |
表4 涂布含铅玻璃料的导电浆的太阳能电池(比较例)
Glass | Uoc | Isc | Rs | FF | Ncell(%) |
PG1 | 0.6273 | 8.625 | 0.00308 | 77.8 | 17.69 |
PG2 | 0.6218 | 8.670 | 0.01658 | 62.6 | 13.86 |
PG3 | 0.6205 | 8.660 | 0.01805 | 61.4 | 13.56 |
PG4 | 0.6209 | 8.450 | 0.00313 | 78.1 | 17.44 |
PG5 | 0.6194 | 8.640 | 0.02950 | 46.9 | 10.30 |
由表3及表4之性能测试可知,本申请的所有包含碲-铋-锌-钨-氧化物的无铅玻璃料的导电浆(实施例G1至G15)皆具备与大部分含铅玻璃料的导电浆(比较例PG1、PG4)相近的转换效率;本发明之所有含无铅玻璃料的导电浆(实施例G1至G15)甚至较部分含铅玻璃料的导电浆(比较例PG2、PG3、PG5)具备无可预期的转换效率。
因此,本申请已提供对环境友好、可于低温烧结、却仍具备已知含铅玻璃料特性等优异功效的无铅导电浆。
上述较佳实施例仅举例说明本申请的技术特征及其技术效果,所述实施例的技术仍可适当地进行各种实质等效组合、修饰、置换及/或转用方式予以实施。因此,本申请的权利范围须以权利要求书中所界定的范围为准。
Claims (12)
1.一种导电浆,其特征在于,包括:(a)导电金属,占固体重量85至99.5重量%;(b)包含碲-铋-锌-钨-氧化物的无铅玻璃料,占固体重量的0.5至15重量%;以及(c)有机载体;所述固体重量是指(a)导电金属及(b)无铅玻璃料的总重量,其中所述无铅玻璃料中氧化硒的比例为0.5至2重量%。
2.如权利要求1所述的导电浆,其特征在于,其中所述导电金属包含银粉。
3.如权利要求1所述的导电浆,其特征在于,其中所述无铅玻璃料中氧化碲、氧化铋、氧化锌及氧化钨的比例分别为55至90重量%、0.1至15重量%、0.1至15重量%及0.1至15重量%。
4.如权利要求1所述的导电浆,其特征在于,进一步包含一种或多种选自下列组成的群组的金属氧化物:氧化锆(ZrO2)、五氧化二钒(V2O5)、氧化银(Ag2O)、三氧化二铒(Er2O3)、氧化锡(SnO)、氧化镁(MgO)、三氧化二铷(Nd2O3)、三氧化二铝(Al2O3)、二氧化硒(SeO2)、二氧化钛(TiO2)、氧化钠(Na2O)、氧化钾(K2O)、五氧化二磷(P2O5)、二氧化钼(MoO2)、二氧化锰(MnO2)、氧化镍(NiO)、氧化锂(Li2O)、三氧化二钐(Sm2O3)、二氧化锗(GeO2)、三氧化二铟(In2O3)、三氧化二镓(Ga2O3)、二氧化硅(SiO2)及三氧化二铁(Fe2O3)。
5.如权利要求1所述的导电浆,其特征在于,其中所述无铅玻璃料进一步包含一种或多种选自下列组成的群组的金属元素:磷(P)、钡(Ba)、钠(Na)、镁(Mg)、钙(Ca)、锶(Sr)、铝(Al)、锂(Li)、钾(K)、锆(Zr)、钒(V)、铁(Fe)、铟(In)、锰(Mn)、锡(Sn)、镍(Ni)、锑(Sb)、银(Ag)、硅(Si)、铒(Er)、锗(Ge)、钛(Ti)、镓(Ga)、铈(Ce)、铌(Nb)、钐(Sm)及镧(La),其比例为所述无铅玻璃料的0.1至10重量%。
6.如权利要求1所述的导电浆,其特征在于,其中所述无铅玻璃料进一步包含一种或多种选自下列组成的群组的金属元素氧化物:磷(P)、钡(Ba)、钠(Na)、镁(Mg)、钙(Ca)、锶(Sr)、铝(Al)、锂(Li)、钾(K)、锆(Zr)、钒(V)、铁(Fe)、铟(In)、锰(Mn)、锡(Sn)、镍(Ni)、锑(Sb)、银(Ag)、硅(Si)、铒(Er)、锗(Ge)、钛(Ti)、镓(Ga)、铈(Ce)、铌(Nb)、钐(Sm)及镧(La),其比例为所述无铅玻璃料的0.1至10重量%。
7.如权利要求1所述的导电浆,其特征在于,其中所述有机载体是包含聚合物与溶剂的溶液。
8.如权利要求1所述的导电浆,其特征在于,其中所述有机载体进一步包含一种或多种选自黏度调整剂、分散剂、触变剂及湿润剂组成的群组的功能性添加剂。
9.一种制品,其特征在于,包含半导体基底,以及设置在所述半导体基底上如权例要求1至8中任一项的导电浆。
10.如权利要求9所述的制品,其特征在于,进一步包含一个或多个设置于所述半导体基底上的抗反射涂层,且所述导电浆与所述抗反射涂层接触并与所述半导体基底电性接触。
11.如权利要求10所述的制品,其特征在于,其中所述制品为半导体装置。
12.如权利要求11所述的制品,其特征在于,其中所述半导体装置为太阳能电池。
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CN102081986A (zh) * | 2009-10-28 | 2011-06-01 | 昭荣化学工业株式会社 | 用于形成太阳能电池电极的导电膏 |
CN102903414A (zh) * | 2011-07-29 | 2013-01-30 | 硕禾电子材料股份有限公司 | 导电组合物和用于太阳能电池片的导电组合物 |
WO2014050703A1 (ja) * | 2012-09-26 | 2014-04-03 | 株式会社村田製作所 | 導電性ペースト及び太陽電池 |
WO2014126293A1 (ko) * | 2013-02-15 | 2014-08-21 | 제일모직 주식회사 | 태양전지 전극 형성용 조성물 및 이로부터 제조된 전극 |
WO2014157958A1 (ko) * | 2013-03-27 | 2014-10-02 | 제일모직 주식회사 | 태양전지 전극 형성용 조성물 및 이로부터 제조된 전극 |
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ES2641145T5 (es) | 2021-03-12 |
EP3032547A1 (en) | 2016-06-15 |
JP2016110975A (ja) | 2016-06-20 |
EP3032547B2 (en) | 2020-07-08 |
EP3032547B1 (en) | 2017-06-28 |
JP6042933B2 (ja) | 2016-12-14 |
ES2641145T3 (es) | 2017-11-07 |
TWI591652B (zh) | 2017-07-11 |
US20160163895A1 (en) | 2016-06-09 |
TW201515019A (zh) | 2015-04-16 |
CN105679402A (zh) | 2016-06-15 |
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