JPS591679A - エツチング液の制御管理方法 - Google Patents
エツチング液の制御管理方法Info
- Publication number
- JPS591679A JPS591679A JP10924782A JP10924782A JPS591679A JP S591679 A JPS591679 A JP S591679A JP 10924782 A JP10924782 A JP 10924782A JP 10924782 A JP10924782 A JP 10924782A JP S591679 A JPS591679 A JP S591679A
- Authority
- JP
- Japan
- Prior art keywords
- etching
- hydrochloric acid
- soln
- concn
- concentration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10924782A JPS591679A (ja) | 1982-06-25 | 1982-06-25 | エツチング液の制御管理方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10924782A JPS591679A (ja) | 1982-06-25 | 1982-06-25 | エツチング液の制御管理方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS591679A true JPS591679A (ja) | 1984-01-07 |
JPH0158270B2 JPH0158270B2 (zh) | 1989-12-11 |
Family
ID=14505338
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10924782A Granted JPS591679A (ja) | 1982-06-25 | 1982-06-25 | エツチング液の制御管理方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS591679A (zh) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6144499U (ja) * | 1984-08-22 | 1986-03-24 | 株式会社タダノ | 屈伸機構の作動制御装置 |
JPS6159300U (zh) * | 1984-09-25 | 1986-04-21 | ||
JPS61217500A (ja) * | 1985-03-22 | 1986-09-27 | 新明和工業株式会社 | 作業車の作動制御装置 |
JPS6462483A (en) * | 1987-08-28 | 1989-03-08 | Ibm | Regeneration of metal-containing acidic solution |
EP0342669A2 (en) * | 1988-05-20 | 1989-11-23 | Mitsubishi Gas Chemical Company, Inc. | Method for preparing thin copper foil-clad substrate for circuit boards |
JPH0665763A (ja) * | 1992-08-21 | 1994-03-08 | Tsurumi Soda Co Ltd | エッチング廃液処理装置 |
JPH08269747A (ja) * | 1995-03-31 | 1996-10-15 | Nippon Aqua Kk | エッチング液の再生方法およびエッチング液 |
JP2011522395A (ja) * | 2008-01-11 | 2011-07-28 | ピーピージー インダストリーズ オハイオ, インコーポレイテッド | バイア内の導電性コア上に電着コーティングを有する回路ボードおよびその作製方法 |
-
1982
- 1982-06-25 JP JP10924782A patent/JPS591679A/ja active Granted
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6144499U (ja) * | 1984-08-22 | 1986-03-24 | 株式会社タダノ | 屈伸機構の作動制御装置 |
JPS6159300U (zh) * | 1984-09-25 | 1986-04-21 | ||
JPS61217500A (ja) * | 1985-03-22 | 1986-09-27 | 新明和工業株式会社 | 作業車の作動制御装置 |
JPS6462483A (en) * | 1987-08-28 | 1989-03-08 | Ibm | Regeneration of metal-containing acidic solution |
EP0342669A2 (en) * | 1988-05-20 | 1989-11-23 | Mitsubishi Gas Chemical Company, Inc. | Method for preparing thin copper foil-clad substrate for circuit boards |
JPH0665763A (ja) * | 1992-08-21 | 1994-03-08 | Tsurumi Soda Co Ltd | エッチング廃液処理装置 |
JPH08269747A (ja) * | 1995-03-31 | 1996-10-15 | Nippon Aqua Kk | エッチング液の再生方法およびエッチング液 |
JP3597250B2 (ja) * | 1995-03-31 | 2004-12-02 | 日本アクア株式会社 | エッチング液の再生方法およびエッチング液再生装置 |
JP2011522395A (ja) * | 2008-01-11 | 2011-07-28 | ピーピージー インダストリーズ オハイオ, インコーポレイテッド | バイア内の導電性コア上に電着コーティングを有する回路ボードおよびその作製方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0158270B2 (zh) | 1989-12-11 |
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