JPS59166285A - 超純水の比抵抗制御装置 - Google Patents

超純水の比抵抗制御装置

Info

Publication number
JPS59166285A
JPS59166285A JP4057483A JP4057483A JPS59166285A JP S59166285 A JPS59166285 A JP S59166285A JP 4057483 A JP4057483 A JP 4057483A JP 4057483 A JP4057483 A JP 4057483A JP S59166285 A JPS59166285 A JP S59166285A
Authority
JP
Japan
Prior art keywords
ultrapure water
branch
flow path
flow rate
carbon dioxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4057483A
Other languages
English (en)
Japanese (ja)
Other versions
JPS632231B2 (enrdf_load_stackoverflow
Inventor
Takashi Omori
大森　孝志
Katsunori Kuroki
勝憲 黒木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kurita Water Industries Ltd
Original Assignee
Kurita Water Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kurita Water Industries Ltd filed Critical Kurita Water Industries Ltd
Priority to JP4057483A priority Critical patent/JPS59166285A/ja
Publication of JPS59166285A publication Critical patent/JPS59166285A/ja
Publication of JPS632231B2 publication Critical patent/JPS632231B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
JP4057483A 1983-03-14 1983-03-14 超純水の比抵抗制御装置 Granted JPS59166285A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4057483A JPS59166285A (ja) 1983-03-14 1983-03-14 超純水の比抵抗制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4057483A JPS59166285A (ja) 1983-03-14 1983-03-14 超純水の比抵抗制御装置

Publications (2)

Publication Number Publication Date
JPS59166285A true JPS59166285A (ja) 1984-09-19
JPS632231B2 JPS632231B2 (enrdf_load_stackoverflow) 1988-01-18

Family

ID=12584248

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4057483A Granted JPS59166285A (ja) 1983-03-14 1983-03-14 超純水の比抵抗制御装置

Country Status (1)

Country Link
JP (1) JPS59166285A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60876A (ja) * 1983-05-27 1985-01-05 Nomura Micro Sci Kk ウェ−ハの洗浄などに使用する比抵抗の低い超純水の製法並びにその装置
JPS6312391A (ja) * 1986-07-02 1988-01-19 Nomura Micro Sci Kk 超純水の比抵抗制御方法及び装置
JPS6320085A (ja) * 1986-07-10 1988-01-27 Toray Ind Inc 精製水製造装置
JP2007021454A (ja) * 2005-07-21 2007-02-01 Ngk Insulators Ltd 機能水生成装置及びそれを用いた機能水生成方法
DE19853638B4 (de) * 1997-05-21 2013-06-06 Dainippon Ink And Chemicals, Inc. Verfahren zum Hinzufügen von Kohlendioxidgas zu ultrareinem Wasser

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011245425A (ja) * 2010-05-27 2011-12-08 Disco Corp 混合装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60876A (ja) * 1983-05-27 1985-01-05 Nomura Micro Sci Kk ウェ−ハの洗浄などに使用する比抵抗の低い超純水の製法並びにその装置
JPS6312391A (ja) * 1986-07-02 1988-01-19 Nomura Micro Sci Kk 超純水の比抵抗制御方法及び装置
JPS6320085A (ja) * 1986-07-10 1988-01-27 Toray Ind Inc 精製水製造装置
DE19853638B4 (de) * 1997-05-21 2013-06-06 Dainippon Ink And Chemicals, Inc. Verfahren zum Hinzufügen von Kohlendioxidgas zu ultrareinem Wasser
JP2007021454A (ja) * 2005-07-21 2007-02-01 Ngk Insulators Ltd 機能水生成装置及びそれを用いた機能水生成方法

Also Published As

Publication number Publication date
JPS632231B2 (enrdf_load_stackoverflow) 1988-01-18

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