JPS5916424B2 - メモリトランジスタの製法 - Google Patents

メモリトランジスタの製法

Info

Publication number
JPS5916424B2
JPS5916424B2 JP50021138A JP2113875A JPS5916424B2 JP S5916424 B2 JPS5916424 B2 JP S5916424B2 JP 50021138 A JP50021138 A JP 50021138A JP 2113875 A JP2113875 A JP 2113875A JP S5916424 B2 JPS5916424 B2 JP S5916424B2
Authority
JP
Japan
Prior art keywords
film
memory transistor
manufacturing
gate
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP50021138A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5195781A (show.php
Inventor
俊男 和田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP50021138A priority Critical patent/JPS5916424B2/ja
Publication of JPS5195781A publication Critical patent/JPS5195781A/ja
Publication of JPS5916424B2 publication Critical patent/JPS5916424B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Non-Volatile Memory (AREA)
JP50021138A 1975-02-20 1975-02-20 メモリトランジスタの製法 Expired JPS5916424B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50021138A JPS5916424B2 (ja) 1975-02-20 1975-02-20 メモリトランジスタの製法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50021138A JPS5916424B2 (ja) 1975-02-20 1975-02-20 メモリトランジスタの製法

Publications (2)

Publication Number Publication Date
JPS5195781A JPS5195781A (show.php) 1976-08-21
JPS5916424B2 true JPS5916424B2 (ja) 1984-04-16

Family

ID=12046524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50021138A Expired JPS5916424B2 (ja) 1975-02-20 1975-02-20 メモリトランジスタの製法

Country Status (1)

Country Link
JP (1) JPS5916424B2 (show.php)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01133424U (show.php) * 1988-03-07 1989-09-11

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57133679A (en) * 1981-02-12 1982-08-18 Toshiba Corp Manufacture of nonvolatile semiconductor memory storage

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01133424U (show.php) * 1988-03-07 1989-09-11

Also Published As

Publication number Publication date
JPS5195781A (show.php) 1976-08-21

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