JPS59158330U - ウエハカセツト治具の支持装置 - Google Patents

ウエハカセツト治具の支持装置

Info

Publication number
JPS59158330U
JPS59158330U JP5140483U JP5140483U JPS59158330U JP S59158330 U JPS59158330 U JP S59158330U JP 5140483 U JP5140483 U JP 5140483U JP 5140483 U JP5140483 U JP 5140483U JP S59158330 U JPS59158330 U JP S59158330U
Authority
JP
Japan
Prior art keywords
wafer cassette
support device
cassette jig
jig support
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5140483U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0429562Y2 (enExample
Inventor
則夫 村上
平井　澄夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP5140483U priority Critical patent/JPS59158330U/ja
Publication of JPS59158330U publication Critical patent/JPS59158330U/ja
Application granted granted Critical
Publication of JPH0429562Y2 publication Critical patent/JPH0429562Y2/ja
Granted legal-status Critical Current

Links

JP5140483U 1983-04-07 1983-04-07 ウエハカセツト治具の支持装置 Granted JPS59158330U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5140483U JPS59158330U (ja) 1983-04-07 1983-04-07 ウエハカセツト治具の支持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5140483U JPS59158330U (ja) 1983-04-07 1983-04-07 ウエハカセツト治具の支持装置

Publications (2)

Publication Number Publication Date
JPS59158330U true JPS59158330U (ja) 1984-10-24
JPH0429562Y2 JPH0429562Y2 (enExample) 1992-07-17

Family

ID=30181812

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5140483U Granted JPS59158330U (ja) 1983-04-07 1983-04-07 ウエハカセツト治具の支持装置

Country Status (1)

Country Link
JP (1) JPS59158330U (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5759345A (en) * 1980-09-26 1982-04-09 Mitsubishi Electric Corp Feeder for semiconductor substrate

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5759345A (en) * 1980-09-26 1982-04-09 Mitsubishi Electric Corp Feeder for semiconductor substrate

Also Published As

Publication number Publication date
JPH0429562Y2 (enExample) 1992-07-17

Similar Documents

Publication Publication Date Title
JPS59158330U (ja) ウエハカセツト治具の支持装置
JPS6016538U (ja) 半導体ウエハの片面処理装置
JPS5937228U (ja) 軸状部品の整列搬送装置
JPH088293B2 (ja) チップ実装装置
JPS6013740U (ja) 試料保持装置
JPS5933240U (ja) 遠心乾燥機
JPS6117742U (ja) 半導体製造装置
JPS5923732U (ja) 回転式イオン注入装置に於けるウエハ取付装置
JPH0412647U (enExample)
JPS59187140U (ja) 半導体露光装置
JPS6067365U (ja) エツチング加工装置
JPS5931242U (ja) 板状部材の切出し供給装置
JPS60179040U (ja) 半導体ペレツト搭載装置
JPS6247940A (ja) イオン注入装置
JPS6048234U (ja) イオン打込装置
JPS61125041U (enExample)
JPS58215052A (ja) ウエハ−収納治具
JPS5815654U (ja) 真空蒸着装置
JPS60100748U (ja) フオトレジスト塗布装置
JPS6130243U (ja) 半導体基板の搬出入装置
JPS60149131U (ja) 気相成長装置
JPS5984843U (ja) 半導体製造用キヤリアハンガ
JPS59104533U (ja) レジスト処理装置
JPS63178330U (enExample)
JPS602830U (ja) 半導体ウエハのエツチング槽