JPS59150155U - 走査電子顕微鏡 - Google Patents

走査電子顕微鏡

Info

Publication number
JPS59150155U
JPS59150155U JP4507283U JP4507283U JPS59150155U JP S59150155 U JPS59150155 U JP S59150155U JP 4507283 U JP4507283 U JP 4507283U JP 4507283 U JP4507283 U JP 4507283U JP S59150155 U JPS59150155 U JP S59150155U
Authority
JP
Japan
Prior art keywords
sample
electron beam
scanning
electron microscope
scanning electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4507283U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0343650Y2 (OSRAM
Inventor
誠 石田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP4507283U priority Critical patent/JPS59150155U/ja
Publication of JPS59150155U publication Critical patent/JPS59150155U/ja
Application granted granted Critical
Publication of JPH0343650Y2 publication Critical patent/JPH0343650Y2/ja
Granted legal-status Critical Current

Links

JP4507283U 1983-03-29 1983-03-29 走査電子顕微鏡 Granted JPS59150155U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4507283U JPS59150155U (ja) 1983-03-29 1983-03-29 走査電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4507283U JPS59150155U (ja) 1983-03-29 1983-03-29 走査電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS59150155U true JPS59150155U (ja) 1984-10-06
JPH0343650Y2 JPH0343650Y2 (OSRAM) 1991-09-12

Family

ID=30175594

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4507283U Granted JPS59150155U (ja) 1983-03-29 1983-03-29 走査電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS59150155U (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006138864A (ja) * 2001-08-29 2006-06-01 Hitachi Ltd 試料寸法測定方法及び走査型電子顕微鏡
JP2007003535A (ja) * 2001-08-29 2007-01-11 Hitachi Ltd 試料寸法測定方法及び走査型電子顕微鏡

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006138864A (ja) * 2001-08-29 2006-06-01 Hitachi Ltd 試料寸法測定方法及び走査型電子顕微鏡
JP2007003535A (ja) * 2001-08-29 2007-01-11 Hitachi Ltd 試料寸法測定方法及び走査型電子顕微鏡

Also Published As

Publication number Publication date
JPH0343650Y2 (OSRAM) 1991-09-12

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