JPS59148254A - 走査電子顕微鏡等の試料移動装置 - Google Patents

走査電子顕微鏡等の試料移動装置

Info

Publication number
JPS59148254A
JPS59148254A JP58021244A JP2124483A JPS59148254A JP S59148254 A JPS59148254 A JP S59148254A JP 58021244 A JP58021244 A JP 58021244A JP 2124483 A JP2124483 A JP 2124483A JP S59148254 A JPS59148254 A JP S59148254A
Authority
JP
Japan
Prior art keywords
sample
scanning
magnification
signal
moving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58021244A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0343742B2 (enrdf_load_stackoverflow
Inventor
Kenji Obara
健二 小原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP58021244A priority Critical patent/JPS59148254A/ja
Publication of JPS59148254A publication Critical patent/JPS59148254A/ja
Publication of JPH0343742B2 publication Critical patent/JPH0343742B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP58021244A 1983-02-10 1983-02-10 走査電子顕微鏡等の試料移動装置 Granted JPS59148254A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58021244A JPS59148254A (ja) 1983-02-10 1983-02-10 走査電子顕微鏡等の試料移動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58021244A JPS59148254A (ja) 1983-02-10 1983-02-10 走査電子顕微鏡等の試料移動装置

Publications (2)

Publication Number Publication Date
JPS59148254A true JPS59148254A (ja) 1984-08-24
JPH0343742B2 JPH0343742B2 (enrdf_load_stackoverflow) 1991-07-03

Family

ID=12049638

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58021244A Granted JPS59148254A (ja) 1983-02-10 1983-02-10 走査電子顕微鏡等の試料移動装置

Country Status (1)

Country Link
JP (1) JPS59148254A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6151658U (enrdf_load_stackoverflow) * 1984-09-06 1986-04-07
JPS6177334A (ja) * 1984-09-21 1986-04-19 Fujitsu Ltd 電子ビ−ム装置
JPS6258852U (enrdf_load_stackoverflow) * 1985-09-30 1987-04-11
JPS6410559A (en) * 1987-07-02 1989-01-13 Nikon Corp Sample image pattern measuring device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5243355A (en) * 1975-10-01 1977-04-05 Jeol Ltd Test data transfer device for electric particle line eqipment
JPS5478075A (en) * 1977-12-05 1979-06-21 Hitachi Ltd Sample image display device
JPS54111274A (en) * 1978-02-20 1979-08-31 Jeol Ltd Scanning electron microscope

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5243355A (en) * 1975-10-01 1977-04-05 Jeol Ltd Test data transfer device for electric particle line eqipment
JPS5478075A (en) * 1977-12-05 1979-06-21 Hitachi Ltd Sample image display device
JPS54111274A (en) * 1978-02-20 1979-08-31 Jeol Ltd Scanning electron microscope

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6151658U (enrdf_load_stackoverflow) * 1984-09-06 1986-04-07
JPS6177334A (ja) * 1984-09-21 1986-04-19 Fujitsu Ltd 電子ビ−ム装置
JPS6258852U (enrdf_load_stackoverflow) * 1985-09-30 1987-04-11
JPS6410559A (en) * 1987-07-02 1989-01-13 Nikon Corp Sample image pattern measuring device

Also Published As

Publication number Publication date
JPH0343742B2 (enrdf_load_stackoverflow) 1991-07-03

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