JPS59141044A - 電子線エネルギー損出スペクトル分析装置 - Google Patents

電子線エネルギー損出スペクトル分析装置

Info

Publication number
JPS59141044A
JPS59141044A JP58014310A JP1431083A JPS59141044A JP S59141044 A JPS59141044 A JP S59141044A JP 58014310 A JP58014310 A JP 58014310A JP 1431083 A JP1431083 A JP 1431083A JP S59141044 A JPS59141044 A JP S59141044A
Authority
JP
Japan
Prior art keywords
signal
energy
sweep
analyzer
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58014310A
Other languages
English (en)
Japanese (ja)
Other versions
JPH046904B2 (enExample
Inventor
Tetsuo Oikawa
哲夫 及川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP58014310A priority Critical patent/JPS59141044A/ja
Publication of JPS59141044A publication Critical patent/JPS59141044A/ja
Publication of JPH046904B2 publication Critical patent/JPH046904B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
JP58014310A 1983-01-31 1983-01-31 電子線エネルギー損出スペクトル分析装置 Granted JPS59141044A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58014310A JPS59141044A (ja) 1983-01-31 1983-01-31 電子線エネルギー損出スペクトル分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58014310A JPS59141044A (ja) 1983-01-31 1983-01-31 電子線エネルギー損出スペクトル分析装置

Publications (2)

Publication Number Publication Date
JPS59141044A true JPS59141044A (ja) 1984-08-13
JPH046904B2 JPH046904B2 (enExample) 1992-02-07

Family

ID=11857520

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58014310A Granted JPS59141044A (ja) 1983-01-31 1983-01-31 電子線エネルギー損出スペクトル分析装置

Country Status (1)

Country Link
JP (1) JPS59141044A (enExample)

Also Published As

Publication number Publication date
JPH046904B2 (enExample) 1992-02-07

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