JPS59138310A - 薄膜抵抗の製造方法 - Google Patents
薄膜抵抗の製造方法Info
- Publication number
- JPS59138310A JPS59138310A JP59006390A JP639084A JPS59138310A JP S59138310 A JPS59138310 A JP S59138310A JP 59006390 A JP59006390 A JP 59006390A JP 639084 A JP639084 A JP 639084A JP S59138310 A JPS59138310 A JP S59138310A
- Authority
- JP
- Japan
- Prior art keywords
- manufacturing
- thin film
- resistor
- temperature
- tempering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
- H01C17/08—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by vapour deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/02—Apparatus or processes specially adapted for manufacturing resistors adapted for manufacturing resistors with envelope or housing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
- H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
- H01C17/26—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by converting resistive material
- H01C17/265—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by converting resistive material by chemical or thermal treatment, e.g. oxydation, reduction, annealing
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Non-Adjustable Resistors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19833301665 DE3301665A1 (de) | 1983-01-20 | 1983-01-20 | Verfahren zur herstellung eines duennfilmwiderstandes |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS59138310A true JPS59138310A (ja) | 1984-08-08 |
Family
ID=6188649
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59006390A Pending JPS59138310A (ja) | 1983-01-20 | 1984-01-19 | 薄膜抵抗の製造方法 |
Country Status (5)
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62159453A (ja) * | 1986-01-07 | 1987-07-15 | Nec Corp | 抵抗体の製造方法 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0704889A3 (de) * | 1994-09-29 | 1998-10-21 | Siemens Aktiengesellschaft | Leistungshalbleiterbauelement mit monolithisch integriertem Messwiderstand und Verfahren zu dessen Herstellung |
DE19945914C1 (de) * | 1999-09-24 | 2001-08-30 | Siemens Ag | Verfahren zur Erzeugung von präzisen Lötflächen auf einem Schaltungsträger, insbesondere Dünnfilm-Substrat |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2610606A (en) * | 1946-09-26 | 1952-09-16 | Polytechnic Inst Brooklyn | Apparatus for the formation of metallic films by thermal evaporation |
DE1089861B (de) * | 1957-11-12 | 1960-09-29 | Int Resistance Co | Metallschichtwiderstand mit aufgedampfter Widerstandsschicht aus einer Nickel-Chrom-Legierung |
GB1249317A (en) * | 1968-11-19 | 1971-10-13 | Mullard Ltd | Semiconductor devices |
US4021277A (en) * | 1972-12-07 | 1977-05-03 | Sprague Electric Company | Method of forming thin film resistor |
DE2356419C3 (de) * | 1973-11-12 | 1979-01-25 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Verfahren zum Herstellen von Widerstandsschichten aus Aluminium-Tantal-Legierungen durch Kathodenzerstäubung |
JPS5123693A (en) * | 1974-08-21 | 1976-02-25 | Tatsuta Densen Kk | Teikoyokinzokuhimakuno netsushori |
US4019168A (en) * | 1975-08-21 | 1977-04-19 | Airco, Inc. | Bilayer thin film resistor and method for manufacture |
JPS52132397A (en) * | 1976-04-30 | 1977-11-07 | Nippon Chemical Ind | Thinnfilm resistor whose resistive temperature coefficient has been improved |
JPS52135095A (en) * | 1976-05-06 | 1977-11-11 | Nippon Chemical Ind | Thinnfilm resistor whose resistive temperature coeficent has been made small |
FR2351478A1 (fr) * | 1976-05-14 | 1977-12-09 | Thomson Csf | Procede de realisation de resistances en couches minces passivees et resistances obtenues par ce procede |
US4194174A (en) * | 1978-06-19 | 1980-03-18 | Microwave Semiconductor Corp. | Method for fabricating ballasted finger electrode |
DE2939236A1 (de) * | 1979-09-27 | 1981-04-02 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur herstellung duenner widerstandsschichten hoher langzeitstabilitaet |
-
1983
- 1983-01-20 DE DE19833301665 patent/DE3301665A1/de not_active Withdrawn
-
1984
- 1984-01-11 GB GB08400677A patent/GB2136213A/en not_active Withdrawn
- 1984-01-16 US US06/570,743 patent/US4530852A/en not_active Expired - Fee Related
- 1984-01-19 JP JP59006390A patent/JPS59138310A/ja active Pending
- 1984-01-19 FR FR8400796A patent/FR2539912A1/fr active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62159453A (ja) * | 1986-01-07 | 1987-07-15 | Nec Corp | 抵抗体の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
FR2539912B3 (US06312121-20011106-C00033.png) | 1985-05-17 |
GB8400677D0 (en) | 1984-02-15 |
US4530852A (en) | 1985-07-23 |
FR2539912A1 (fr) | 1984-07-27 |
GB2136213A (en) | 1984-09-12 |
DE3301665A1 (de) | 1984-07-26 |
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